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RESEARCH PAPER · Materials & Design · 2025

Active learning-enhanced yttrium oxyhydride thin films for photoinduced insulator-to-metal transitions

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Open in your workspace →Saved 2026-10-14 · complete coverage
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Active learning-enhanced yttrium oxyhydride thin films for photoinduced insulator-to-metal transitionsOriginalHow substrate temperature and oxygen flow rate affect surface quality and ring structure of HfO2 film on SiO2 substrate0

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  1. How substrate temperature and oxygen flow rate affect surface quality and ring structure of HfO2 film on SiO2 substrate

    Materials & Design · 2026-03-07

    Yaowei Wei, Hongqin Lei, Fei Zhang, Jianchong Li, Kai Ma, Liang Chen, Jian Cheng, Linjie Zhao, Xianghui Huang, qinghua zhang, Mingjun Chen

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