RESEARCH PAPER · Materials & Design · 2026
How substrate temperature and oxygen flow rate affect surface quality and ring structure of HfO2 film on SiO2 substrate
Yaowei Wei, Hongqin Lei, Fei Zhang, Jianchong Li, Kai Ma, Liang Chen, Jian Cheng, Linjie Zhao, Xianghui Huang, qinghua zhang, Mingjun Chen
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