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RESEARCH PAPER · Science Advances · 2022

Vacuum ultraviolet nonlinear metalens

Ming Lun Tseng, Michael Semmlinger, Ming Zhang, Catherine Arndt, Tzu‐Ting Huang, Jian Yang, Hsin Yu Kuo, Vin‐Cent Su, Mu Ku Chen, Cheng Hung Chu, Benjamin W. Cerjan, Din Ping Tsai, Peter J. Nordlander, Naomi J. Halas

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Vacuum ultraviolet nonlinear metalensOriginalAugmentation of surface plasmon-enhanced second harmonic generation from Au nanoprisms on SiO2/Si: interference contribution4Deep-ultraviolet nonlinear optical crystals: concept development and materials discovery181Vacuum Ultraviolet Light-Generating Metalens0Emerging Trend in Unconventional Metasurfaces: From Nonlinear, Non-Hermitian to Nonclassical Metasurfaces34Pitfalls in the spectral measurements of polarization-altering metasurfaces7High dimensional optical meta-devices: classical to quantum0Ultraviolet metalens and metalens array of focused vortex beams9Large-scale achromatic flat lens by light frequency-domain coherence optimization97Nonlinear photonics with metasurfaces154Enabling smart vision with metasurfaces162Efficient metalens for VUV light collection applications0Extreme Ultraviolet Metaoptics enabled by Vacuum Guiding1Hybrid metalens for UV fluorescence light collection0Revolutionary meta-imaging: from superlens to metalens139超构器件的设计、制造与成像应用9High-quality factor mid-infrared absorber based on all-dielectric metasurfaces14Revisiting Optical Material Platforms for Efficient Linear and Nonlinear Dielectric Metasurfaces in the Ultraviolet, Visible, and Infrared64Integrated-resonant metadevices: a review107Advance of large-area achromatic flat lenses14One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region131Tunable Water‐Based Meta‐Lens23Extreme ultraviolet metalens by vacuum guiding160Full-Stokes parameters detection enabled by a non-interleaved fiber-compatible metasurface5Recent advancements of metalenses for functional imaging62A Topological Directional Coupler Fed by Microstrip Line With Configurable Coupling Coefficient14Hybrid Metalens for Miniaturised Ultraviolet Fluorescence Detection132023 Astrophotonics Roadmap: pathways to realizing multi-functional integrated astrophotonic instruments51Enhancing Focusing and Defocusing Capabilities with a Dynamically Reconfigurable Metalens Utilizing Sb2Se3 Phase-Change Material23Arbitrarily structured quantum emission with a multifunctional metalens118Compact meta-optics infrared camera based on a polarization-insensitive metalens with a large field of view22Simulation of Light Intensity of VUV Lamp Based on Inductively Coupled Plasma Discharge in Low-pressure Kr-He Mixture0Nonlinear harmonic wave manipulation in nonlinear scattering medium via scattering-matrix method31Electromagnetic Wave Tailoring: From One Dimension to Multiple Dimensions48Two-photon polymerization for fabrication of metalenses for diffraction-limited focusing and high-resolution imaging22Enhancing Photon Throughput of Miniaturized Passive Depth-Detection Cameras via Broadband Dispersion-Engineered Metalenses11High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy22Integrated-Resonant Units for Phase Compensation and Efficiency Enhancements in Achromatic Meta-lenses41Advances in nonlinear metasurfaces for imaging, quantum, and sensing applications55Nonlinear chiral metaphotonics: a perspective102Optical performance of synthetic aperture metalens based on hybrid unit-cells15Photonic Meta‐Neurons11A Manufacturability‐Driven Method for Designing Metamaterial Focusing Acoustical Lenses2Polarization-Insensitive Transmissive Metasurfaces Using Pancharatnam–Berry and Resonant Phases in Microwave Band7Advanced manufacturing of dielectric meta-devices90Genetic algorithm assisted meta-atom design for high-performance metasurface optics138Liquid crystal-integrated metasurfaces for an active photonic platform119Meta-device: advanced manufacturing71Metasurfaces from χ(2) -materials0Miniature tunable Airy beam optical meta-device125Nonlinear phenomena empowered by resonant dielectric nanostructures0Ultraviolet and visible metasurfaces0基于非线性超表面的多任务光电混合神经网络（特邀）2Tantalum pentoxide: a new material platform for high-performance dielectric metasurface optics in the ultraviolet and visible region89Modal Phase-Matched Bound States in the Continuum for Enhancing Third Harmonic Generation of Deep Ultraviolet Emission48Metalens in Improving Imaging Quality: Advancements, Challenges, and Prospects for Future Display51Switchable Two-Dimensional AND and Exclusive OR Operation Based on Dual-Wavelength Metasurfaces28Multichannel Linear and Nonlinear Information Encryptions with Malus Metasurfaces21Design and simulation of an extreme ultraviolet metalens based on the Pancharatnam–Berry phase9Efficient Third Harmonic Generation from Magnetic Resonance in Low-Index Dielectric Nanopillars5Metasurface-Controlled Holographic Microcavities8Roadmap for Optical Metasurfaces408Recent developments in biomedical applications of metasurface optics27High-security learning-based optical encryption assisted by disordered metasurface107Giant enhancement of second harmonic generation via merging bound states in the continuum for vacuum ultraviolet radiation15Diamond Based Optical Metasurfaces for Broadband Wavefront Shaping in Harsh Environment37Nonlocal metasurface for dark-field edge emission60Synergy between AI and Optical Metasurfaces: A Critical Overview of Recent Advances21Inverse design of nonlinear metasurfaces for sum frequency generation11Inversely engineered metasurfaces for independent manipulation of transmitted and reflected light fields5Steering abrupt autofocusing beams with metasurfaces [Invited]9Nonlinear upconverted thermal emission through difference frequency generation1Nonlocal meta-lens with Huygens’ bound states in the continuum109Printable Spin-Multiplexed Metasurfaces for Ultraviolet Holographic Displays48A synthetic moving-envelope metasurface antenna for independent control of arbitrary harmonic orders41Convert Polymer Self‐Assembly Nanostructures into Target Functional Materials: An Art of Embattling Molecules11Explainable Encoder–Prediction–Reconstruction Framework for the Prediction of Metasurface Absorption Spectra2Large‐scale fabrication of meta‐axicon with circular polarization on CMOS platform8Shape optimization for high efficiency metasurfaces: theory and implementation70Global Selection Rules and Giant Enhanced Harmonic Generations in LiNbO 3 Nonlinear Meta‐Optics11Large‐Area Floating Display with Wafer‐Scale Manufactured Metalens Arrays26Metasurfaces‐Enabled Advanced Multidimensional Imaging: Principle and Applications1Optoelectronic metadevices108Nonlinear Meta-Devices: From Plasmonic to Dielectric13Progress in metalenses: from single to array36超构表面赋能先进多光谱成像与图像特征检测（特邀）4Numerical studies to generate abrupt autofocusing beam from phase-only metasurface3Meta‐Device for Field‐of‐View Tunability via Adaptive Optical Spatial Differentiation21All-dielectric nonlinear metasurface: from visible to vacuum ultraviolet30Research progress on the principle and application of metalenses based on metasurfaces13Extreme UV metalens consisting of ring meta-atoms3Ultra-large bandwidth fully polarized photodetectors based on displacement-induced chiral dielectric metasurfaces1Ultraviolet Metalens Based on Nonlinear Wavefront Manipulation of Lithium Niobate Metasurfaces12Nanofabrication for Nanophotonics132Nonlinear Metasurfaces: A New Paradigm for Short-Wavelength Generation and Modulation3Efficient Chiral Nonlinear Metasurface Based on Lithium Niobate0Dielectric High-Q Metasurfaces for Surface-Enhanced Deep-UV Absorption and Chiral Photonics27Perfect anomalous refraction metasurfaces empowered half-space optical beam scanning30Third-harmonic generation of ultraviolet light in silicon nitride metasurface: a numerical study of pulse duration dependence6Full Wafer Scale Manufacturing of Directly Printed TiO 2 Metalenses at Visible Wavelengths with Outstanding Focusing Efficiencies30Topology-imprinting in nonlinear metasurfaces16Highly Efficient Ultraviolet Harmonic Generation Based on Coupled Guided Mode Resonances in Lithium Niobate Metasurfaces16Lithium tantalate resonant metasurfaces for highly efficient ultraviolet harmonic generation15Equal-group-delay-metasurface-enabled hybrid lens for wide-field-of-view thermal imaging0High efficiency glass-based VUV metasurfaces7NanoPhotoNet-NL: AI-assisted design of nonlinear multilayer metasurfaces for broadband tunable deep ultraviolet emission8Review for optical metalens based on metasurfaces: fabrication and applications36Reinforcement learning enabled high-efficiency DUV aluminum nitride metagrating0Review of Planar Optical System: Lens Based on Metasurfaces1Silica Meta-Optics: When High Performance Does Not Need a High Index5Anapole enhanced deep-ultraviolet third harmonic generation in a TiO2 metasurface0Digital phase-shift mask projection lithography enabling sub-diffraction-limit resolution for dense nanoscale patterning0Fundamental and emerging applications of metasurfaces in laser optics: an overview1High-efficiency infrared upconversion imaging with nonlinear silicon metasurfaces empowered by quasi-bound states in the continuum12Meta Photonics: From Classical to Quantum0Nonlinear geometric phase control via high-Q quasi-BIC resonance in all-dielectric metasurfaces0Progress in Structured Light with Nonlinear Optics6Reaction-Induced Patterns: Integrating Self-Organization with Top-Down Guidance0Antidisturbance near-infrared-imaging detection based on an arrayed Si -based nanotip optical antenna0Challenges and opportunities of metalenses6High‐Index, Low‐Loss Optical Material Platforms for Ultra‐Broadband Ultraviolet‐to‐Visible Achromatic Metalenses4Recent Developments in Deep‐Ultraviolet Flat Optics4Nonlinear meta-devices for high-dimensional optical applications0Holographic photonic ceramic metasurfaces for challenging environments0P‐4.16: Broadband EUV Focusing Metalens Based on Nanohole Arrays in Aluminum Film0Metasurfaces for deep and extreme ultraviolet optics: a review0High‐Performance Large‐Format AlN‐Based Vacuum Ultraviolet Imaging Detector0

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  1. Augmentation of surface plasmon-enhanced second harmonic generation from Au nanoprisms on SiO2/Si: interference contribution

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  2. Deep-ultraviolet nonlinear optical crystals: concept development and materials discovery

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  3. Vacuum Ultraviolet Light-Generating Metalens

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    Ming Lun Tseng, Michael Semmlinger, Ming Zhang, Catherine Arndt, Tzu‐Ting Huang, Jian Yang, Hsin Yu Kuo, Vin‐Cent Su, Mu Ku Chen, Cheng Hung Chu, Benjamin W. Cerjan, Din Ping Tsai, Peter J. Nordlander, Naomi J. Halas

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  4. Emerging Trend in Unconventional Metasurfaces: From Nonlinear, Non-Hermitian to Nonclassical Metasurfaces

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  5. Pitfalls in the spectral measurements of polarization-altering metasurfaces

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  6. High dimensional optical meta-devices: classical to quantum

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  7. Ultraviolet metalens and metalens array of focused vortex beams

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  8. Large-scale achromatic flat lens by light frequency-domain coherence optimization

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  9. Nonlinear photonics with metasurfaces

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  10. Enabling smart vision with metasurfaces

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  11. Efficient metalens for VUV light collection applications

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  12. Extreme Ultraviolet Metaoptics enabled by Vacuum Guiding

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  16. High-quality factor mid-infrared absorber based on all-dielectric metasurfaces

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  17. Revisiting Optical Material Platforms for Efficient Linear and Nonlinear Dielectric Metasurfaces in the Ultraviolet, Visible, and Infrared

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  18. Integrated-resonant metadevices: a review

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  19. Advance of large-area achromatic flat lenses

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  20. One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

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  21. Tunable Water‐Based Meta‐Lens

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  22. Extreme ultraviolet metalens by vacuum guiding

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  23. Full-Stokes parameters detection enabled by a non-interleaved fiber-compatible metasurface

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  25. A Topological Directional Coupler Fed by Microstrip Line With Configurable Coupling Coefficient

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  26. Hybrid Metalens for Miniaturised Ultraviolet Fluorescence Detection

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  28. Enhancing Focusing and Defocusing Capabilities with a Dynamically Reconfigurable Metalens Utilizing Sb2Se3 Phase-Change Material

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  29. Arbitrarily structured quantum emission with a multifunctional metalens

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  30. Compact meta-optics infrared camera based on a polarization-insensitive metalens with a large field of view

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  31. Simulation of Light Intensity of VUV Lamp Based on Inductively Coupled Plasma Discharge in Low-pressure Kr-He Mixture

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  32. Nonlinear harmonic wave manipulation in nonlinear scattering medium via scattering-matrix method

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  33. Electromagnetic Wave Tailoring: From One Dimension to Multiple Dimensions

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  35. Enhancing Photon Throughput of Miniaturized Passive Depth-Detection Cameras via Broadband Dispersion-Engineered Metalenses

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  39. Nonlinear chiral metaphotonics: a perspective

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  40. Optical performance of synthetic aperture metalens based on hybrid unit-cells

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  41. Photonic Meta‐Neurons

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  42. A Manufacturability‐Driven Method for Designing Metamaterial Focusing Acoustical Lenses

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  43. Polarization-Insensitive Transmissive Metasurfaces Using Pancharatnam–Berry and Resonant Phases in Microwave Band

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  44. Advanced manufacturing of dielectric meta-devices

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  45. Genetic algorithm assisted meta-atom design for high-performance metasurface optics

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  47. Meta-device: advanced manufacturing

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  48. Metasurfaces from χ(2) -materials

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  49. Miniature tunable Airy beam optical meta-device

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  50. Nonlinear phenomena empowered by resonant dielectric nanostructures

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