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RESEARCH PAPER · Physical Chemistry Chemical Physics · 2020

Surface mobility and impact of precursor dosing during atomic layer deposition of platinum: in situ monitoring of nucleation and island growth

Jolien Dendooven, Michiel Van Daele, Eduardo Solano, Ranjith K. Ramachandran, Matthias M. Minjauw, Andrea Resta, Alina Vlad, Y. Garreau, Alessandro Coati, Giuseppe Portale, Christophe Detavernier

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42 direct citing works

Surface mobility and impact of precursor dosing during atomic layer deposition of platinum: in situ monitoring of nucleation and island growthOriginalTuning size and coverage of Pd nanoparticles using atomic layer deposition10Direct Integration of Strained‐Pt Catalysts into Proton‐Exchange‐Membrane Fuel Cells with Atomic Layer Deposition25Study of Pt growth on Si, Al2O3, Au, and Ni surfaces by plasma enhanced atomic layer deposition3Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)2 and Ozone on Si (100) Surface4Aligning time-resolved kinetics (TAP) and surface spectroscopy (AP-XPS) for a more comprehensive understanding of ALD-derived 2D and 3D model catalysts2Surface Chemistry during Atomic Layer Deposition of Pt Studied with Vibrational Sum-Frequency Generation28Atom-by-Atom Synthesis of Multiatom-Supported Catalytic Clusters by Liquid-Phase Atomic Layer Deposition10Selective regulation of Pt clusters inside KY zeolite using atomic layer deposition for n-octane reforming11Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition5Localized growth of atomic-layer-deposited platinum catalysts on plasma-treated surface of carbon nanotubes8Dimension Control of Platinum Nanostructures by Atomic Layer Deposition: From Surface Chemical Reactions to Applications18Tunable Functionality of Pure Nano Cu- and Cu-based Oxide Flexible Conductive Thin Film with Superior Surface Modification14Atomic layer deposition of thin films: from a chemistry perspective85Coaxial Nanowire Electrodes Enable Exceptional Fuel Cell Durability16Atomic Layer Deposition as the Enabler for the Metastable Semiconductor InN and Its Alloys9Evaluating an electric field modulated plasma enhanced atomic layer deposition of platinum layers on different substrates4Atomic layer deposition of Pt nanoparticles using dimethyl (N, N–dimethyl-3-butene-1-amine−N) platinum and H2 reactant and its application to 2D WS2 photodetectors3Controlling Pt nanoparticle sintering by sub-monolayer MgO ALD thin films9Role of the Oxidizing Co-Reactant in Pt Growth by Atomic Layer Deposition Using MeCpPtMe3 and O2/O3/O2-Plasma8Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns8Water-assisted purification during electron beam-induced deposition of platinum and gold3Design and Fabrication of Seven Electrode Deep-Sea Conductivity Sensor with Thick Platinum Film1In Vacuo XPS Study on Pt Growth by Atomic Layer Deposition Using MeCpPtMe3 and N2/NH3 Plasma2Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization1Enhanced ion conductivity detection utilizing superhydrophilic cauliflower-like Pt black electrodes prepared via ultrasonic electrodeposition1In-situ TEM observation of the seed-free growth of five-fold twinned Au decahedra3Controlling platinum loading in PEMFC membrane electrodes by sputtering time: a systematic study from ultra-low to high loading for optimal performance0Real-time observation and mitigation of Pt nanoparticle sintering during propane dehydrogenation: ALD-based strategies for nanocatalyst stabilization1Analytical model for island growth mode in thin film deposition1

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29 direct citing papers saved.

  1. Tuning size and coverage of Pd nanoparticles using atomic layer deposition

    Applied Surface Science · 2020-10-26

    Ji‐Yu Feng, Ranjith K. Ramachandran, Eduardo Solano, Matthias M. Minjauw, Michiel Van Daele, A. Vantomme, Daniel Hermida‐Merino, Alessandro Coati, Hilde Poelman, Christophe Detavernier, Jolien Dendooven

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  2. Direct Integration of Strained‐Pt Catalysts into Proton‐Exchange‐Membrane Fuel Cells with Atomic Layer Deposition

    Advanced Materials · 2021-06-10

    Shicheng Xu, Zhaoxuan Wang, Samuel M. Dull, Yunzhi Liu, Dong Un Lee, Juan S. Lezama-Pacheco, Marat Orazov, Per Erik Vullum, Anup Lal Dadlani, Olga Vinogradova, Peter Schindler, Qizhan Tam, Thomas D. Schladt, Jonathan Edward Mueller, Sebastian Kirsch, Gerold Hübner, Drew Christopher Higgins, Jan Torgersen, Venkatasubramanian Viswanathan, Thomas Francisco Jaramillo, Fritz B. Prinz

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  3. Study of Pt growth on Si, Al2O3, Au, and Ni surfaces by plasma enhanced atomic layer deposition

    Journal of Applied Physics · 2021-09-14

    Mingming Yan, Tianchong Zhang, Bo Wang, Jing Liu, Xiaoxiao Liang, Yuanze Xu, Futing Yi

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  4. Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)2 and Ozone on Si (100) Surface

    Processes · 2021-12-13

    Chunyu Cheng, Yiming Zou, Jiahui Li, Amanda Jiamin Ong, Ronn Goei, Jingfeng Huang, Shuzhou Li, Alfred Iing Yoong Tok

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  5. Aligning time-resolved kinetics (TAP) and surface spectroscopy (AP-XPS) for a more comprehensive understanding of ALD-derived 2D and 3D model catalysts

    Faraday Discussions · 2022-01-01

    E. Redekop, Hilde Poelman, Matthias Filez, Ranjith K. Ramachandran, Jolien Dendooven, Christophe Detavernier, Guy B Marin, Unni Olsbye, Vladimir Galvita

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  6. Surface Chemistry during Atomic Layer Deposition of Pt Studied with Vibrational Sum-Frequency Generation

    The Journal of Physical Chemistry C · 2022-01-31

    Vincent Vandalon, Adriaan J. M. Mackus, W. M. M. Kessels

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  7. Atom-by-Atom Synthesis of Multiatom-Supported Catalytic Clusters by Liquid-Phase Atomic Layer Deposition

    ACS Sustainable Chemistry & Engineering · 2022-03-10

    Benjamin P. Le Monnier, Louisa Savereide, Murat Kılıç, Raphael Schnyder, Mounir Mensi, Claudia E. Avalos, Ursula Röthlisberger, Jeremy S. Luterbacher

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  8. Selective regulation of Pt clusters inside KY zeolite using atomic layer deposition for n-octane reforming

    Fuel · 2022-08-20

    Mengxia Yan, Dan Xu, Shuyuan Wang, Baoshan Wu, Yong Ping Yang, Yongwang Li

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  9. Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition

    Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2022-10-04

    J. Woodward, Samantha G. Rosenberg, David R. Boris, Michael J. Johnson, Scott G. Walton, Scooter David Johnson, Zachary R. Robinson, Neeraj Nepal, Karl F Ludwig, Jennifer K. Hite, Charles R. Eddy

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  10. Localized growth of atomic-layer-deposited platinum catalysts on plasma-treated surface of carbon nanotubes

    Scripta Materialia · 2022-11-24

    Junmo Koo, Heon Jun Jeong, Wonjoon Choi, Joon Hyung Shim

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  11. Dimension Control of Platinum Nanostructures by Atomic Layer Deposition: From Surface Chemical Reactions to Applications

    Chemistry of Materials · 2023-03-14

    Kim-Hue Thi Dinh, Huong T. T. Ta, Ngoc Linh Nguyen, Viet Thong Le, Việt Hương Nguyễn, Hao Van Bui

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  12. Tunable Functionality of Pure Nano Cu- and Cu-based Oxide Flexible Conductive Thin Film with Superior Surface Modification

    Surfaces and Interfaces · 2023-03-15

    Nurul Akmal Che Lah

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  13. Atomic layer deposition of thin films: from a chemistry perspective

    International Journal of Extreme Manufacturing · 2023-05-24

    Jinxiong Li, Gaoda Chai, Xinwei Wang

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  14. Coaxial Nanowire Electrodes Enable Exceptional Fuel Cell Durability

    Advanced Materials · 2023-06-20

    Gaoqiang Yang, Siddharth Komini Babu, Wipula Priya Rasika Liyanage, Ulises Martinez, Dmitri Routkevitch, Rangachary Mukundan, Rodney L. Borup, David A. Cullen, Jacob S. Spendelow

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  15. Atomic Layer Deposition as the Enabler for the Metastable Semiconductor InN and Its Alloys

    Crystal Growth & Design · 2023-09-19

    Henrik Pedersen, Chih‐Wei Hsu, Neeraj Nepal, J. Woodward, Charles R. Eddy

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  16. Evaluating an electric field modulated plasma enhanced atomic layer deposition of platinum layers on different substrates

    Journal of Applied Physics · 2023-10-17

    Mingming Yan, Tianchong Zhang, Bo Wang, Jing Liu, Xiaoxiao Liang, Yuanze Xu, Futing Yi

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  17. Atomic layer deposition of Pt nanoparticles using dimethyl (N, N–dimethyl-3-butene-1-amine−N) platinum and H2 reactant and its application to 2D WS2 photodetectors

    Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2024-01-01

    Dain Shin, Inkyu Sohn, Donghyun Kim, Jaehyeok Kim, Taewook Nam, Youngjun Kim, Jusang Park, Tatsuya Nakazawa, Seung‐min Chung, Hyungjun Kim

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  18. Controlling Pt nanoparticle sintering by sub-monolayer MgO ALD thin films

    Nanoscale · 2024-01-01

    Zhiwei Zhang, Matthias Filez, Eduardo Solano, Nithin Poonkottil, Jin Chun Li, Matthias M. Minjauw, Hilde Poelman, Martin Rosenthal, Philipp Brüner, Vladimir Galvita, Christophe Detavernier, Jolien Dendooven

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  19. Role of the Oxidizing Co-Reactant in Pt Growth by Atomic Layer Deposition Using MeCpPtMe3 and O2/O3/O2-Plasma

    The Journal of Physical Chemistry C · 2024-01-31

    Jin Chun Li, Sylwia Klejna, Matthias M. Minjauw, Jolien Dendooven, Christophe Detavernier

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  20. Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns

    Chemistry of Materials · 2024-06-11

    Jyoti Sinha, Leonidas Gallis, Jan‐Willem J. Clerix, Marleen van der Veen, Jerome W. F. Innocent, A. Illiberi, Michael E. Givens, Laura Nyns, Annelies Delabie

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  21. Water-assisted purification during electron beam-induced deposition of platinum and gold

    Beilstein Journal of Nanotechnology · 2024-07-18

    Cristiano Glessi, Fabian A Polman, K. HAGEN

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  22. Design and Fabrication of Seven Electrode Deep-Sea Conductivity Sensor with Thick Platinum Film

    Unknown journal · 2024-07-28

    Yuzhen Guo, Zengxing Zhang, Jianwei Liu, Shiqiang Zhang, Jianyi Zheng, Chenyang Xue

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  23. In Vacuo XPS Study on Pt Growth by Atomic Layer Deposition Using MeCpPtMe3 and N2/NH3 Plasma

    The Journal of Physical Chemistry C · 2024-09-20

    Jin Chun Li, Matthias M. Minjauw, Eduardo Solano, Giulio D’Acunto, Payam Shayesteh, Joachim Schnadt, Christophe Detavernier, Jolien Dendooven

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  24. Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization

    Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2024-12-06

    Sujin Kwon, Bonggeun Shong

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  25. Enhanced ion conductivity detection utilizing superhydrophilic cauliflower-like Pt black electrodes prepared via ultrasonic electrodeposition

    Science China Materials · 2025-05-06

    Yuzhen Guo, Zengxing Zhang, Jianyi Zheng, Zhenyin Hai, Hongyan Xu, Chengkai Xia, Jin Ling Chai, Meng Li, Heying Zhang, Jianwei Liu, Shiqiang Zhang, Chenyang Xue

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  26. In-situ TEM observation of the seed-free growth of five-fold twinned Au decahedra

    Acta Materialia · 2025-10-04

    Anqi Zheng, Rui Pan, Yuheng Huang, Mao Ye, Kuibo Yin, Litao Sun

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  27. Controlling platinum loading in PEMFC membrane electrodes by sputtering time: a systematic study from ultra-low to high loading for optimal performance

    Journal of Materials Chemistry C · 2026-01-01

    Quan Wang, Chang Jiang, Yaru Li, Jianglong Cheng, Hongbin Wang

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  28. Real-time observation and mitigation of Pt nanoparticle sintering during propane dehydrogenation: ALD-based strategies for nanocatalyst stabilization

    Applied Catalysis B: Environmental · 2026-02-13

    Zhiwei Zhang, Eduardo Solano, Nithin Poonkottil, Jin Li, Matthias M. Minjauw, Hilde Poelman, Maarten B. J. Roeffaers, Vladimir Galvita, Christophe Detavernier, Jolien Dendooven, Matthias Filez

    Read original paper ↗ ·

  29. Analytical model for island growth mode in thin film deposition

    Acta Materialia · 2026-02-18

    Wojciech Szmyt, Ivo Utke

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