RESEARCH PAPER · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2022
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
J. Woodward, Samantha G. Rosenberg, David R. Boris, Michael J. Johnson, Scott G. Walton, Scooter David Johnson, Zachary R. Robinson, Neeraj Nepal, Karl F Ludwig, Jennifer K. Hite, Charles R. Eddy
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