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RESEARCH PAPER · Nano Letters · 2019

Generating Third Harmonic Vacuum Ultraviolet Light with a TiO 2 Metasurface

Michael Semmlinger, Ming Zhang, Ming Lun Tseng, Tzu‐Ting Huang, Jian Yang, Din Ping Tsai, Peter J. Nordlander, Naomi J. Halas

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Generating Third Harmonic Vacuum Ultraviolet Light with a TiO 2 MetasurfaceOriginalForward and Backward Switching of Nonlinear Unidirectional Emission from GaAs Nanoantennas79Design and fabrication of the vacuum ultraviolet nonlinear metasurfaces0Nanomanipulation with Designer Thermoplasmonic Metasurface0Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes20Metasurface Integrated Monolayer Exciton Polariton73Tunable and nonlinear metamaterials for controlling circular polarization27Circularly polarized vacuum ultraviolet coherent light generation using a square lattice photonic crystal nanomembrane31In situ temporal measurement of ultrashort laser pulses at full power during high-intensity laser–matter interactions16Femtosecond Laser Induced Phase Transformation of TiO2 with Exposed Reactive Facets for Improved Photoelectrochemistry Performance33Efficient ultrafast all-optical modulation in a nonlinear crystalline gallium phosphide nanodisk at the anapole excitation93Low‐Index‐Contrast Dielectric Lattices on Metal for Refractometric Sensing39Dielectric Metasurfaces Enabling Advanced Optical Biosensors330Integrated Molar Chiral Sensing Based on High-Q Metasurface196Nonlinear Optical Properties of Ag Nanoplates Plasmon Resonance and Applications in Ultrafast Photonics20Self‐Cleaning Titanium Dioxide Metasurfaces with UV Irradiation29Principles, Functions, and Applications of Optical Meta‐Lens244Strongly Coupled Systems for Nonlinear Optics57Phase characterisation of metalenses116Multistate Tuning of Third Harmonic Generation in Fano-Resonant Hybrid Dielectric Metasurfaces2Resonant dielectric metasurfaces in strong optical fields40Deep- and vacuum-ultraviolet metaphotonic light sources34Multistate Tuning of Third Harmonic Generation in Fano‐Resonant Hybrid Dielectric Metasurfaces51Full-color enhanced second harmonic generation using rainbow trapping in ultrathin hyperbolic metamaterials216Nonlinear Dielectric Nanoantennas and Metasurfaces: Frequency Conversion and Wavefront Control110Reconfigurable terahertz metasurfaces coherently controlled by wavelength‐scale‐structured light19Tuning nonlinear second-harmonic generation in AlGaAs nanoantennas via chalcogenide phase-change material27Direction Controllable Nano‐Patterning of Titanium by Ultrafast Laser for Surface Coloring and Optical Encryption35All-dielectric χ(2) metasurfaces: recent progress121Meta-Lens in the Sky30Recent Progress on Optical Frequency Conversion in Nonlinear Metasurfaces and Nanophotonics12Wafer-Scale Functional Metasurfaces on Free-Standing Membranes0Vectorial metasurface holography137Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications164Computational design and optimization of nanostructured AlN deep-UV grating reflectors2Vacuum ultraviolet nonlinear metalens126Highly-sensitive sensor based on toroidal dipole governed by bound state in the continuum in dielectric non-coaxial core-shell cylinder37Third- and Second-Harmonic Generation in All-Dielectric Nanostructures: A Mini Review40Artificial Intelligence in Meta-optics224Quasi‐Bound States in the Continuum Enhanced Second‐Harmonic Generation in Thin‐Film Lithium Niobate58Anomalous wavefront control of third-harmonic generation via graphene-based nonlinear metasurfaces in the terahertz regime9Sum-Frequency Generation in High-Q GaP Metasurfaces Driven by Leaky-Wave Guided Modes47Active multiband varifocal metalenses based on orbital angular momentum division multiplexing78Vacuum Ultraviolet Light-Generating Metalens0Near-infrared toroidal dipole response supported by silicon metasurfaces4A Meta‐Device for Intelligent Depth Perception121High dimensional optical meta-devices: classical to quantum0Plasmonic anapole metamaterial for refractive index sensing119Nonlinear photonics with metasurfaces154Efficient second- and higher-order harmonic generation from LiNbO 3 metasurfaces39超构器件的设计、制造与成像应用9Manipulation of Scattering Spectra with Topology of Light and Matter28Revisiting Optical Material Platforms for Efficient Linear and Nonlinear Dielectric Metasurfaces in the Ultraviolet, Visible, and Infrared64Integrated-resonant metadevices: a review107Extreme ultraviolet metalens by vacuum guiding160Plasmonic Nanostructure Lattices for High‐Performance Sensing50Hybrid Metasurfaces of Plasmonic Lattices and 2D Materials51Dielectric metasurfaces for next-generation optical biosensing: a comparison with plasmonic sensing49Third Harmonic Generation Enhanced by Generalized Kerker Condition in All‐Dielectric Metasurfaces18Optimization of the Geometrical Design for an All-Dielectric Metasurface Sensor with a High Refractive-Index Response4Advances in nonlinear metasurfaces for imaging, quantum, and sensing applications55Efficient second harmonic generation from nonlinear one-dimensional meta-grating metasurface under vertically incident pump laser excitation2Effects of metasurface geometry on magnetic dipole resonances for circular asymmetric transmission in the ultraviolet region5Meta-device: advanced manufacturing71Nonlinear phenomena empowered by resonant dielectric nanostructures0Enhanced terahertz third-harmonic generation based on the graphene-assisted meta-grating structure3Resonant third‐harmonic generation driven by out‐of‐equilibrium electron dynamics in sodium‐based near‐zero index thin films9Modal Phase-Matched Bound States in the Continuum for Enhancing Third Harmonic Generation of Deep Ultraviolet Emission48Realizing high-efficiency third harmonic generation via accidental bound states in the continuum28Design and simulation of an extreme ultraviolet metalens based on the Pancharatnam–Berry phase9Efficient Third Harmonic Generation from Magnetic Resonance in Low-Index Dielectric Nanopillars5Giant enhancement of third harmonic generation via guided mode resonances in notched silicon waveguides9Chiroptical Enhancement in Hybrid Core–Shell Nanoresonators1Strong coupling in an asymmetric two-dimensional guided mode resonance metasurface structure and enhancement for optical third-harmonic generation6Q-switched Nd:YVO 4 laser operating at 1064 nm with NiPS 3 nanoflakes onto a silica metasurface as saturable absorbers4Enhancement of third‐harmonic generation in all‐dielectric kite‐shaped metasurfaces driven by quasi‐bound states in the continuum14Cryogenic nonlinear microscopy of high‐Q metasurfaces coupled with transition metal dichalcogenide monolayers10Enhanced terahertz dual-band third-harmonic generation in graphene-assisted metamaterial8Observation of Anapole Resonances in Lithium Niobate Metasurfaces with Significantly Enhanced Second Harmonic Generation6Harnessing collisional nonlinearity for enhanced harmonic generation by ultraviolet plasmonic nanoparticles3A synthetic moving-envelope metasurface antenna for independent control of arbitrary harmonic orders41Doubly resonant third-harmonic generation in near-zero-index heterogeneous nanostructures6Intelligent Photonics: A Disruptive Technology to Shape the Present and Redefine the Future41Optical anapoles excited by UV-A illumination3Effects of Thickness and Grain Size on Harmonic Generation in Thin AlN Films3van der Waals NbOCl2 Nanodisks for Enhanced Second-Harmonic Generation12Nonlinear Meta-Devices: From Plasmonic to Dielectric13All-dielectric nonlinear metasurface: from visible to vacuum ultraviolet30Deep ultraviolet conversion of electric and magnetic anapole modes through manipulating incident angle4Quantitative Phase Imaging for Meta‐Lenses by Phase Retrieval11Terahertz molecular vibrational sensing using 3D printed anapole meta-biosensor30Angularly tunable second-harmonic generation from a structural-symmetry-broken silicon metasurface with bound states in the continuum4Nonlinear Metasurfaces: A New Paradigm for Short-Wavelength Generation and Modulation3Dielectric High-Q Metasurfaces for Surface-Enhanced Deep-UV Absorption and Chiral Photonics27Third-harmonic generation of ultraviolet light in silicon nitride metasurface: a numerical study of pulse duration dependence6Toward the meta-atom library: experimental validation of machine learning-based Mie-tronics9Surface-enhanced infrared absorption (SEIRA) based on Metasurface: Principles, biochemical sensing applications, and future perspective9Angle-insensitive nonlinear enhancement in an all-dielectric metasurface via Brillouin-zone folding6Quasi‐Bound States in the Continuum Supported in Titanium Oxide Metasurfaces with Nanoslits Fabricated by Thermal Oxidation0NanoPhotoNet-NL: AI-assisted design of nonlinear multilayer metasurfaces for broadband tunable deep ultraviolet emission8Strong coupling of double resonance designs and epsilon‐near‐zero modes for mode‐matching enhancement of second‐harmonic generation5Reinforcement learning enabled high-efficiency DUV aluminum nitride metagrating0Review on all-dielectric metasurface encryption technology1Wavelength‐Locked Quasi‐BICs for Enhanced Third‐Harmonic Generation in Silicon Metasurfaces9Anapole enhanced deep-ultraviolet third harmonic generation in a TiO2 metasurface0Digital phase-shift mask projection lithography enabling sub-diffraction-limit resolution for dense nanoscale patterning0Enhancement of the third-harmonic signal from topological material based on a plasmonic nanogroove array0Fundamental and emerging applications of metasurfaces in laser optics: an overview1Laser direct writing of nonlinear metasurfaces on phase-change material Ge2Sb2Te5 for enhanced third harmonic generation0Polarization Control via Artificial Optical Nonlinearity in Dielectric Metasurfaces2Quasi-bound states in the continuum for nonlinear applications in asymmetry metasurfaces2Real-time molecular specific BTEX detection at TLV-TWA concentration levels1Angle-insensitive and efficient third-harmonic generation in high Q-factor all-dielectric metasurfaces0Dual-Tunable Strong Exciton–Photon Coupling in TiO 2 –WS 2 Hybrid Metasurfaces for High-Performance Refractive Index Sensing0Nonlinear meta-devices for high-dimensional optical applications0P‐4.16: Broadband EUV Focusing Metalens Based on Nanohole Arrays in Aluminum Film0Metasurfaces for deep and extreme ultraviolet optics: a review0Energy velocity as an optical design indicator for the ultraviolet nonlinear response of ALD-grown TiO 2 thin films0Guided-mode-resonance-based surface second-harmonic generation in notched silicon waveguide metasurface0

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  1. Forward and Backward Switching of Nonlinear Unidirectional Emission from GaAs Nanoantennas

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  2. Design and fabrication of the vacuum ultraviolet nonlinear metasurfaces

    Conference on Lasers and Electro-Optics · 2020-01-01

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  3. Nanomanipulation with Designer Thermoplasmonic Metasurface

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  4. Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes

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  5. Metasurface Integrated Monolayer Exciton Polariton

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  6. Tunable and nonlinear metamaterials for controlling circular polarization

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  7. Circularly polarized vacuum ultraviolet coherent light generation using a square lattice photonic crystal nanomembrane

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  10. Efficient ultrafast all-optical modulation in a nonlinear crystalline gallium phosphide nanodisk at the anapole excitation

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  13. Integrated Molar Chiral Sensing Based on High-Q Metasurface

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  14. Nonlinear Optical Properties of Ag Nanoplates Plasmon Resonance and Applications in Ultrafast Photonics

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  15. Self‐Cleaning Titanium Dioxide Metasurfaces with UV Irradiation

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  19. Multistate Tuning of Third Harmonic Generation in Fano-Resonant Hybrid Dielectric Metasurfaces

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  21. Deep- and vacuum-ultraviolet metaphotonic light sources

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  23. Full-color enhanced second harmonic generation using rainbow trapping in ultrathin hyperbolic metamaterials

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  35. Vacuum ultraviolet nonlinear metalens

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  36. Highly-sensitive sensor based on toroidal dipole governed by bound state in the continuum in dielectric non-coaxial core-shell cylinder

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  37. Third- and Second-Harmonic Generation in All-Dielectric Nanostructures: A Mini Review

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  43. Vacuum Ultraviolet Light-Generating Metalens

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  44. Near-infrared toroidal dipole response supported by silicon metasurfaces

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  45. A Meta‐Device for Intelligent Depth Perception

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  46. High dimensional optical meta-devices: classical to quantum

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  47. Plasmonic anapole metamaterial for refractive index sensing

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  49. Efficient second- and higher-order harmonic generation from LiNbO 3 metasurfaces

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