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RESEARCH PAPER · Nano Letters · 2018

Vacuum Ultraviolet Light-Generating Metasurface

Michael Semmlinger, Ming Lun Tseng, Jian Yang, Ming Zhang, Chao Zhang, Wei‐Yi Tsai, Din Ping Tsai, Peter J. Nordlander, Naomi J. Halas

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Vacuum Ultraviolet Light-Generating MetasurfaceOriginalSecond Harmonic Spectroscopy of Surface Lattice Resonances98Nonlinear Generation of Vacuum Ultraviolet Light with an All-Dielectric Metasurface0Polarization state of second harmonic generation in split ring resonator based meta-molecule0Spin-ARPES EUV Beamline for Ultrafast Materials Research and Development20Laser-induced subwavelength structures by microdroplet superlens16Polarization Generation and Manipulation Based on Nonlinear Plasmonic Metasurfaces17Plasmonic Metasurfaces with High UV–Vis Transmittance for Photopatterning of Designer Molecular Orientations27Nonlinear Generation of Vacuum Ultraviolet Light with an All-Dielectric Metasurface0Stress‐Induced 3D Chiral Fractal Metasurface for Enhanced and Stabilized Broadband Near‐Field Optical Chirality92Resonant dielectric metasurfaces: active tuning and nonlinear effects62Generating Ultrabroadband Deep-UV Radiation and Sub-10 nm Gap by Hybrid-Morphology Gold Antennas23Nonlinear Metasurfaces Governed by Bound States in the Continuum561Resonance-free ultraviolet metaoptics via photon nanosieves9Spatial Frequency Multiplexed Meta-Holography and Meta-Nanoprinting110Optical meta-devices: advances and applications26Enhanced Nonlinear Yield from Barium Titanate Metasurface Down to the Near Ultraviolet40Generating Third Harmonic Vacuum Ultraviolet Light with a TiO 2 Metasurface118Merging Top‐Down and Bottom‐Up Approaches to Fabricate Artificial Photonic Nanomaterials with a Deterministic Electric and Magnetic Response9Steering Second-Harmonic Beams in Nanophotonic Waveguides by Gratings7Titanium Dioxide Metasurface for Vacuum Ultraviolet Third-harmonic Generation0Chromatic Dispersion Manipulation Based on Metalenses96Forward and Backward Switching of Nonlinear Unidirectional Emission from GaAs Nanoantennas79Giant Efficiency of Visible Second-Harmonic Light by an All-Dielectric Multiple-Quantum-Well Metasurface29Design and fabrication of the vacuum ultraviolet nonlinear metasurfaces0Limitations of the Metasurface Diluted-Slab Model7Plasmon-enhanced nonlinear nanofocusing of gold nanoprisms driven via an ultrafast azimuthal vector beam6Tunable Third Harmonic Vacuum Ultraviolet Coherent Light Generation Using Dielectric Nanomembranes0Nonlinear optics with resonant metasurfaces88Metasurface Modeling by a Thin Slab0Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes20Tailoring ZnO Spontaneous Emission with Plasmonic Radiative Local Density of States Using Cathodoluminescence Microscopy5Metasurface Integrated Monolayer Exciton Polariton73Progressive Self-Boosting Anapole-Enhanced Deep-Ultraviolet Third Harmonic During Few-Cycle Laser Radiation17Tunable and nonlinear metamaterials for controlling circular polarization27Circularly polarized vacuum ultraviolet coherent light generation using a square lattice photonic crystal nanomembrane31Dielectric Metasurfaces Enabling Advanced Optical Biosensors330Toroidal Metaphotonics and Metadevices139Suppressing Edge Back-Scattering of Electromagnetic Waves Using Coding Metasurface Purfle9Efficient non-perturbative high-harmonic generation from nonlinear metasurfaces with low pump intensity21Second-Harmonic Generation in Resonant Nonlinear Metasurfaces Based on Lithium Niobate200Continuous Wave Second Harmonic Generation Enabled by Quasi-Bound-States in the Continuum on Gallium Phosphide Metasurfaces244Large-area, low-cost near-infrared meta-surface reflector based on a pixelated two-dimensional silicon disk array10Dielectric Resonance-Based Optical Metasurfaces: From Fundamentals to Applications91Generation of super-resolved optical needle and multifocal array using graphene oxide metalenses62Principles, Functions, and Applications of Optical Meta‐Lens244Phase characterisation of metalenses116Dielectric Huygens’ metasurfaces with diverse functionalities in the range from near-UV to deep-UV6Recent advances in ultraviolet nanophotonics: from plasmonics and metamaterials to metasurfaces104Deep- and vacuum-ultraviolet metaphotonic light sources34Enhanced Multiphoton Processes in Perovskite Metasurfaces64Nonlinear Dielectric Nanoantennas and Metasurfaces: Frequency Conversion and Wavefront Control110All-dielectric χ(2) metasurfaces: recent progress121Meta-Lens in the Sky30Recent Progress on Optical Frequency Conversion in Nonlinear Metasurfaces and Nanophotonics12Review on Metasurfaces: An Alternative Approach to Advanced Devices and Instruments57Externally Driven Nonlinear Time-Variant Metasurfaces33Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications164Vacuum ultraviolet nonlinear metalens126Three-dimensional printed and fluidic dielectric material optically transparent metasurface for switchable absorption and reflection functionality in microwave frequency region7Augmentation of surface plasmon-enhanced second harmonic generation from Au nanoprisms on SiO2/Si: interference contribution4Artificial Intelligence in Meta-optics224Optical Sensing by Metamaterials and Metasurfaces: From Physics to Biomolecule Detection131Cylindrical Metalens for Generation and Focusing of Free-Electron Radiation38Sum-Frequency Generation in High-Q GaP Metasurfaces Driven by Leaky-Wave Guided Modes47Efficient near UV-vacuum UV sources based on second-harmonic generation enhanced by high-Q quasi-BICs in all-dielectric metasurfaces of low-index materials22High dimensional optical meta-devices: classical to quantum0Post-2000 nonlinear optical materials and measurements: data tables and best practices76Nonlinear photonics with metasurfaces154High‐Q Nanophotonics over the Full Visible Spectrum Enabled by Hexagonal Boron Nitride Metasurfaces56Design of Selective Metasurface Filter for Thermophotovoltaic Energy Conversion5超构器件的设计、制造与成像应用9Colloidal self‐assembly based ultrathin metasurface for perfect absorption across the entire visible spectrum17Revisiting Optical Material Platforms for Efficient Linear and Nonlinear Dielectric Metasurfaces in the Ultraviolet, Visible, and Infrared64Extremely high-Q quasi-BICs induced by simultaneously broken out-of- and in-plane symmetries in dielectric metasurfaces of low-index materials5Integrated-resonant metadevices: a review107Recent Advances in Metaphotonic Biosensors24Electromagnetic Wave Tailoring: From One Dimension to Multiple Dimensions48Integrated-Resonant Units for Phase Compensation and Efficiency Enhancements in Achromatic Meta-lenses41Efficient dual-wavelength metasurface for second-order differential edge detection in the ultraviolet3Advances in nonlinear metasurfaces for imaging, quantum, and sensing applications55Information multiplexing from optical holography to multi‐channel metaholography39Metasurfaces and their intelligent advances25Advanced manufacturing of dielectric meta-devices90Meta-device: advanced manufacturing71Miniature tunable Airy beam optical meta-device125Nonlinear phenomena empowered by resonant dielectric nanostructures0Ultraviolet and visible metasurfaces0Tantalum pentoxide: a new material platform for high-performance dielectric metasurface optics in the ultraviolet and visible region89Modal Phase-Matched Bound States in the Continuum for Enhancing Third Harmonic Generation of Deep Ultraviolet Emission48Giant enhancement of second harmonic generation via merging bound states in the continuum for vacuum ultraviolet radiation15Efficient Second‐Harmonic Generation with Weak Polarization Sensitivity in Gallium Nitride Metasurfaces via Bound States in the Continuum5pyMOE: Mask design and modeling for micro optical elements and flat optics7Nonlinear Meta-Devices: From Plasmonic to Dielectric13Photoreconfigurable Metasurface for Independent Full-Space Control of Terahertz Waves5Resonant Meta‐Lens in the Visible14Deep‐UV Silicon Polaritonic Metasurfaces for Enhancing Biomolecule Autofluorescence and Two‐Dimensional Material Double‐Resonance Raman Scattering13All-dielectric nonlinear metasurface: from visible to vacuum ultraviolet30Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications37Quantitative Phase Imaging for Meta‐Lenses by Phase Retrieval11Nonlinear Metasurfaces: A New Paradigm for Short-Wavelength Generation and Modulation3Third-harmonic generation of ultraviolet light in silicon nitride metasurface: a numerical study of pulse duration dependence6Resonance-mode-induced beating effect for THz wave generation and principal demonstration1Theoretical study in dual-channel quasi bound-states in the continuum in YaBa2Cu3O7 ceramic split-ring resonator metasurface and multi-functional responsive sensing3Electro-optical switching in a nonlinear metasurface3Highly Efficient Ultraviolet Harmonic Generation Based on Coupled Guided Mode Resonances in Lithium Niobate Metasurfaces16Surface-enhanced infrared absorption (SEIRA) based on Metasurface: Principles, biochemical sensing applications, and future perspective9Lithium tantalate resonant metasurfaces for highly efficient ultraviolet harmonic generation15The second-order nonlinear optical properties of κ-phase gallium oxide4NanoPhotoNet-NL: AI-assisted design of nonlinear multilayer metasurfaces for broadband tunable deep ultraviolet emission8Reinforcement learning enabled high-efficiency DUV aluminum nitride metagrating0Anapole enhanced deep-ultraviolet third harmonic generation in a TiO2 metasurface0Digital phase-shift mask projection lithography enabling sub-diffraction-limit resolution for dense nanoscale patterning0Fundamental and emerging applications of metasurfaces in laser optics: an overview1Progress in Structured Light with Nonlinear Optics6从增强因子到转换效率：微纳光学二次谐波综述（特邀）0In Situ Tracking of Saturation Dynamics in Nonlinear Metasurfaces3Quasi-bound states in the continuum for nonlinear applications in asymmetry metasurfaces2Active steering of cathodoluminescence through a generalized Smith–Purcell effect0High‐Index, Low‐Loss Optical Material Platforms for Ultra‐Broadband Ultraviolet‐to‐Visible Achromatic Metalenses4Dual-Tunable Strong Exciton–Photon Coupling in TiO 2 –WS 2 Hybrid Metasurfaces for High-Performance Refractive Index Sensing0Recent Developments in Deep‐Ultraviolet Flat Optics4Roadmap to Intelligent Metasurfaces: Tuning Mechanisms, Multiplexing Principles, and Systematic Integration0Nonlinear meta-devices for high-dimensional optical applications0Metasurfaces for deep and extreme ultraviolet optics: a review0

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  1. Second Harmonic Spectroscopy of Surface Lattice Resonances

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    David C. Hooper, Christian Kuppe, Danqing Wang, Weijia Wang, Jun Guan, Teri W. Odom, Ventsislav Kolev Valev

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  2. Nonlinear Generation of Vacuum Ultraviolet Light with an All-Dielectric Metasurface

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  3. Polarization state of second harmonic generation in split ring resonator based meta-molecule

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  4. Spin-ARPES EUV Beamline for Ultrafast Materials Research and Development

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  5. Laser-induced subwavelength structures by microdroplet superlens

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  6. Polarization Generation and Manipulation Based on Nonlinear Plasmonic Metasurfaces

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  7. Plasmonic Metasurfaces with High UV–Vis Transmittance for Photopatterning of Designer Molecular Orientations

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  8. Nonlinear Generation of Vacuum Ultraviolet Light with an All-Dielectric Metasurface

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  9. Stress‐Induced 3D Chiral Fractal Metasurface for Enhanced and Stabilized Broadband Near‐Field Optical Chirality

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  10. Resonant dielectric metasurfaces: active tuning and nonlinear effects

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  11. Generating Ultrabroadband Deep-UV Radiation and Sub-10 nm Gap by Hybrid-Morphology Gold Antennas

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    Liping Shi, José R. C. Andrade, Ayhan Tajalli, Jiao Geng, Juemin Yi, T. Heidenblut, F. B. Segerink, Ihar Babushkin, Maria Kholodtsova, H. Merdji, Hubertus M.J. Bastiaens, Uwe Morgner, Milutin Kovačev

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  12. Nonlinear Metasurfaces Governed by Bound States in the Continuum

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  13. Resonance-free ultraviolet metaoptics via photon nanosieves

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  14. Spatial Frequency Multiplexed Meta-Holography and Meta-Nanoprinting

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  15. Optical meta-devices: advances and applications

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  16. Enhanced Nonlinear Yield from Barium Titanate Metasurface Down to the Near Ultraviolet

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  17. Generating Third Harmonic Vacuum Ultraviolet Light with a TiO 2 Metasurface

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  18. Merging Top‐Down and Bottom‐Up Approaches to Fabricate Artificial Photonic Nanomaterials with a Deterministic Electric and Magnetic Response

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  19. Steering Second-Harmonic Beams in Nanophotonic Waveguides by Gratings

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  20. Titanium Dioxide Metasurface for Vacuum Ultraviolet Third-harmonic Generation

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  21. Chromatic Dispersion Manipulation Based on Metalenses

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  23. Giant Efficiency of Visible Second-Harmonic Light by an All-Dielectric Multiple-Quantum-Well Metasurface

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  25. Limitations of the Metasurface Diluted-Slab Model

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  30. Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes

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  32. Metasurface Integrated Monolayer Exciton Polariton

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    Yueyang Chen, Shengnan Miao, Tianmeng Wang, Ding Zhong, Abhi Saxena, Colin Ming Earn Chow, James Whitehead, Dario Gerace, Xiaodong Xu, Su‐Fei Shi, Arka Majumdar

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  33. Progressive Self-Boosting Anapole-Enhanced Deep-Ultraviolet Third Harmonic During Few-Cycle Laser Radiation

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  34. Tunable and nonlinear metamaterials for controlling circular polarization

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  35. Circularly polarized vacuum ultraviolet coherent light generation using a square lattice photonic crystal nanomembrane

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  36. Dielectric Metasurfaces Enabling Advanced Optical Biosensors

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  37. Toroidal Metaphotonics and Metadevices

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  38. Suppressing Edge Back-Scattering of Electromagnetic Waves Using Coding Metasurface Purfle

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  39. Efficient non-perturbative high-harmonic generation from nonlinear metasurfaces with low pump intensity

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  40. Second-Harmonic Generation in Resonant Nonlinear Metasurfaces Based on Lithium Niobate

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  41. Continuous Wave Second Harmonic Generation Enabled by Quasi-Bound-States in the Continuum on Gallium Phosphide Metasurfaces

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  42. Large-area, low-cost near-infrared meta-surface reflector based on a pixelated two-dimensional silicon disk array

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  43. Dielectric Resonance-Based Optical Metasurfaces: From Fundamentals to Applications

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  48. Recent advances in ultraviolet nanophotonics: from plasmonics and metamaterials to metasurfaces

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  49. Deep- and vacuum-ultraviolet metaphotonic light sources

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  50. Enhanced Multiphoton Processes in Perovskite Metasurfaces

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