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RESEARCH ARTICLE · ACS Applied Materials & Interfaces · 2017

Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn–Al–O Interfaces Fabricated by Atomic Layer Deposition

Yang Li, Rui Yao, Huanhuan Wang, Xiaoming Wu, Jinzhu Wu, Jinzhu Wu, Xiaohong Wu, Xiaohong Wu, Wei Qin

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Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn–Al–O Interfaces Fabricated by Atomic Layer DepositionOriginalMultipurpose surface functionalization on AZ31 magnesium alloys by atomic layer deposition: tailoring the corrosion resistance and electrical performance50van der Waals epitaxial two-dimensional CdS x Se (1−x) semiconductor alloys with tunable-composition and application to flexible optoelectronics35High mobility transparent conductive Al-doped ZnO thin films by atomic layer deposition63Performance and Stability Enhancement of In–Sn–Zn–O TFTs Using SiO 2 Gate Dielectrics Grown by Low Temperature Atomic Layer Deposition72Colossal X‐Ray‐Induced Persistent Photoconductivity in Current‐Perpendicular‐to‐Plane Ferroelectric/Semiconductor Junctions25High-performance flexible oxide TFTs: optimization of a-IGZO film by modulating the voltage waveform of pulse DC magnetron sputtering without post treatment46Investigations on the bias temperature stabilities of oxide thin film transistors using In–Ga–Zn–O channels prepared by atomic layer deposition62Low-temperature combustion synthesis and UV treatment processed p-type Li:NiO x active semiconductors for high-performance electronics51Polymeric platform for the growth of chemically anchored ZnO nanostructures by ALD9The stabilization mechanism and size effect of nonpolar-to-polar crystallography facet tailored ZnO nano/micro rods via a top-down strategy6High‐Power Microwave‐Assisted Ga Doping, an Effective Method to Tailor n‐ZnO/p‐Si Heterostructure Optoelectronic Characteristics9Coexistence of broad-bandwidth and strong microwave absorption in Co2+-Zr4+ co-doped barium ferrite ceramics51Synthesis, properties and applications of ZnO nanomaterials with oxygen vacancies: A review511Rod-like grains with high aspect ratio and adjustment of competitive growth of perovskite and tungsten bronze structure in (1−x)Ba(Zr0.2Ti0.8)O3-xBa0.7Ca0.3FeTaO5 ceramics5Low-Temperature Fabrication of Robust, Transparent, and Flexible Thin-Film Transistors with a Nanolaminated Insulator40Structure, electricity, and bandgap modulation in Fe2O3–doped potassium sodium niobate ceramics23Effect of inductively coupled plasma and plasma parameters on magnetron sputtered Al-Doped ZnO highly conductive thin films at low-temperature17Nitrogen-Doped ZnO Film Fabricated Via Rapid Low-Temperature Atomic Layer Deposition for High-Performance ZnON Transistors35Surface Analysis and Optical Properties of Cu-Doped ZnO Thin Films Deposited by Radio Frequency Magnetron Sputtering38Reduced Contact Resistance Between Metal and n-Ge by Insertion of ZnO with Argon Plasma Treatment13Robust Transparent and Conductive Gas Diffusion Multibarrier Based on Mg- and Al-Doped ZnO as Indium Tin Oxide-Free Electrodes for Organic Electronics37Effective deicing of vehicle windows and thermal response of asymmetric multilayered transparent-film heaters26Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development137Evolution of ZnO nanostructures as hexagonal disk: Implementation as photoanode material and efficiency enhancement in Al: ZnO based dye sensitized solar cells43Improved gate bias stressing stability of IGZO thin film transistors using high-k compounded ZrO2/HfO2 nanolaminate as gate dielectric12Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review280Enhanced charge transport in Al-doped ZnO nanotubes designed via simultaneous etching and Al doping of H 2 O-oxidized ZnO nanorods for solar cell applications47Combustion synthesis of nontoxic water-induced InYO thin film and application in thin film transistor9Exploring determinants of lattice structure and high energy storage properties of Fe-doped SBN ceramics16Enhanced Stability in Zr-Doped ZnO TFTs With Minor Influence on Mobility by Atomic Layer Deposition40A superior microwave absorption material: Ni2+-Zr4+ Co-Doped barium ferrite ceramics with large reflection loss and broad bandwidth35Broadband polarization-insensitive microwave-absorbing composite material based on carbon nanotube film metamaterial and ferrite29Optical properties of polar thin films: ZnO (0001) and ZnO (000–1) on sapphire substrate12Observation of room temperature ferromagnetism and magneto-electric coupling in dual transition element substituted ferroelectric potassium sodium niobate4High-performance flexible transparent conductive thin films on PET substrates with a CuM/AZO structure21Tolerance to electron beams of TiO2 film photocatalyst7Effects of graphene quantum dots interlayer on performance of ZnO-based photodetectors21Li4Ti5O12 coated with ultrathin aluminum-doped zinc oxide films as an anode material for lithium-ion batteries40Review Article: Atomic layer deposition of doped ZnO films89Effect of oxygen deficiency on vis‐light photocatalytic activity in AZO5Solution-Processed Yttrium-Doped IZTO Semiconductors for High-Stability Thin Film Transistor Applications41High-Detectivity/-Speed Flexible and Self-Powered Graphene Quantum Dots/Perovskite Photodiodes28Impact of Ho-Ni substitution on structural, morphological and dielectrical characteristics of BaFe12O19 M-type hexagonal ferrite55Thermally Stable Optical Filtering Using Silicon-Based Comb-Like Asymmetric Grating for Sensing Applications18Enhanced Performance of Atomic Layer Deposited Thin-Film Transistors With High-Quality ZnO/Al2O3 Interface27Dual-source device architecture for self-diagnosis and correction of gate bias-stress instability in flexible transparent ZnO thin-film transistors9Molecular Patching Engineering to Drive Energy Conversion as Efficient and Environment‐Friendly Cell toward Wireless Power Transmission291The Effects of Post Annealing Process on the Electrical Performance and Stability of Al-Zn-O Thin-Film Transistors26Zinc Oxide Films with High Transparency and Crystallinity Prepared by a Low Temperature Spatial Atomic Layer Deposition Process30Energy Level-Graded Al-Doped ZnO Protection Layers for Copper Nanowire-Based Window Electrodes for Efficient Flexible Perovskite Solar Cells50Memristive Behavior Enabled by Amorphous–Crystalline 2D Oxide Heterostructure49Light-induced bias stability of crystalline indium-tin-zinc-oxide thin film transistors32Mechanism of chlorine treatment in the resistivity stabilization of high-performance AZO/i-ZnO composite transparent conductive layer2Tailoring La0.8Sr0.2MnO3/La/Sr nanocomposite using a novel complementary method as well as dissecting its microwave, shielding, optical, and magnetic characteristics50Potential low powered smart window coating using a stoichiometrically downgraded vanadium oxide thin film structure3Laser-Assisted Interface Engineering for Functional Interfacial Layer of Al/ZnO/Al Resistive Random Access Memory (RRAM)33Enhanced dielectric and magnetic properties in Mn-doped bismuth ferrite multiferroic nanoceramics24Laser digital patterning of conductive electrodes using metal oxide nanomaterials58Role of defects and microstructure on the electrical properties of solution-processed Al-doped ZnO transparent conducting films22Thermal Evaporation–Oxidation Deposited Aluminum Oxide as an Interfacial Modifier to Improve the Performance and Stability of Zinc Oxide-Based Planar Perovskite Solar Cells12Thermal evolution of point defects in indium doped ZnO transparent conducting films7Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films22Work function-tunable ZnO/Ag/ZnO film as an effective hole injection electrode prepared via nickel doping for thermally activated delayed fluorescence-based flexible blue organic light-emitting diodes43Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition60Al:ZnO as a platform for near-zero-index photonics: enhancing the doping efficiency of atomic layer deposition12Regulation of the photogenerated carrier transfer process during photoelectrochemical water splitting: A review53Composition-dependent electrical property of (1-x)Sr0.75Ba0.25Nb2O6-xPbZr0.52Ti0.48O3 solid solution ceramics21Digitally aligned ZnO nanowire array based synaptic transistors with intrinsically controlled plasticity for short-term computation and long-term memory16Highly flexible and free-standing carbon nanotube/hollow carbon nanocage hybrid films for high-performance supercapacitors4Large-sized crystal growth and piezoelectric properties of the single crystals of LiNa 5 Mo 9 O 306Dramatically Improved Thermoelectric Properties by Defect Engineering in Cement-Based Composites45Defect engineering of ZnO: Review on oxygen and zinc vacancies336Facile fabrication of MgZnO/ZnO composites for high performance thin film transistor14Modulation of wall thickness of Al‐doped ZnO nanotubes by nanolamination of atomic layer deposition for oxygen sensing10BCl3/Ar plasma etching for the performance enhancement of Al-doped ZnO thin films14Effect of oxygen annealing temperature on properties of spatial atomic layer deposited aluminum-doped zinc oxide films15Study of the Structure and Electronic Properties of the ZnO Monolayer: Density Functional Theory0Threshold Voltage Modulation in a Transistor with a Two-Dimensional Electron Gas Channel at the Interface between Al2O3 and Sub-5 nm ZnO Films12Robust and Electrically Conductive ZnO Thin Films and Nanostructures: Their Applications in Thermally and Chemically Harsh Environments10Understanding the roles of atomic layer deposition in improving the electrochemical performance of lithium-ion batteries44Triple-Stack ZnO/AlZnO/YZnO Heterojunction Oxide Thin-Film Transistors by Spray Pyrolysis for High Mobility and Excellent Stability64Atomic-Scale Layer-by-Layer Deposition of FeSiAl@ZnO@Al2O3 Hybrid with Threshold Anti-Corrosion and Ultra-High Microwave Absorption Properties in Low-Frequency Bands201High‐Quality Plasmonic Materials TiN and ZnO:Al by Atomic Layer Deposition6Metal-oxide field-effect transistors for display and beyond0Scattering of surface traveling wave and its attenuation in absorbing coating11A novel passivating electron contact for high-performance silicon solar cells by ALD Al-doped TiO247Flexible All‐Inorganic Room‐Temperature Chemiresistors Based on Fibrous Ceramic Substrate and Visible‐Light‐Powered Semiconductor Sensing Layer56Location-Optoelectronic Property Correlation in ZnO:Al Thin Film by RF Magnetron Sputtering and Its Photovoltaic Application9Effects of Channel Thickness on Electrical Performance and Stability of High-Performance InSnO Thin-Film Transistors26Tunable physical properties of Al-doped ZnO thin films by O2 and Ar plasma treatments19Effect of Zn doping on the structural and optical properties of NiO thin films deposited by spray pyrolysis technique0Transparent Flexible IGZO Thin Film Transistors Fabricated at Room Temperature29Understanding of Mobility Limiting Factors in Solution Grown Al Doped ZnO Thin Film and its Low Temperature Remedy14UV-Laser Annealing for Improved Resistive Switching Performance and Reliability of Flexible Resistive Random-Access Memory15Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process20Recent progress and perspectives on atomic‐layer‐deposited semiconducting oxides for transistor applications33Characterization of optimized properties for InGaZnO semiconductor and thin film transistor by oxygen partial pressure0Photocatalytic and tunable optical absorption properties of sandwich-like p-n type LaBO3/KNbO3 (B = Al, Ga) heterostructures1High-quality transparent conductive indium oxide film deposition by reactive pulsed magnetron sputtering: Determining the limits of substrate heating21Oxygen-regulated photoelectric performance of ZnOx film on Ni foil0Role of defects in the electronic properties of Al doped ZnO films deposited by spray pyrolysis22Effect of water flow rate on properties of zinc oxide thin films prepared using spatial atomic layer deposition3Atomic Layer Engineering of Aluminum‐Doped Zinc Oxide Films for Efficient and Stable Perovskite Solar Cells40Self-aligned liquid crystals and enhanced electro-optical properties on solution-processed aluminum gallium tin zinc oxide surfaces7The role of intrinsic trap states in the semiconductor/insulating interface on the electrical performance of spray-coated thin-film transistors3Assess the performance of microstructural and optoelectronic properties of dual porous silicon decorated by ZrO 2 /Al 2 O 3 nanoparticles0Repeated bending durability evaluation of ZnO and Al-doped ZnO thin films grown on cyclo-olefin polymer for flexible oxide device applications1Precursor mediated and defect engineered ZnO nanostructures using thermal chemical vapor deposition for green light emission19Confocal magnetron sputtering deposition of Cu/AZO bilayer structures: effect of Cu thickness on microstructural and optoelectronic properties8Engineering of Optical and Electrical Properties of Electrodeposited Highly Doped Al:ZnO and In:ZnO for Cost-Effective Photovoltaic Device Technology22Confining Fe2O3 in Silicalite-1 for effective catalytic activity in bias-assisted photo-Fenton system for nitrobenzene degradation12Electronic control of catalytic activity of ZnO for higher alcohols synthesis via tailoring Fermi level25Demonstration of HfO2-Based Gate Dielectric With ~0.8-nm Equivalent Oxide Thickness on Si0.8Ge0.2 by Trimethylaluminum Pre-Treatment and Al Scavenger7Performance improvement of a sol–gel ZTO-based TFT due to an interfacial SnO x dopant layer6Defect passivation through quick radiative annealing for high-performance solution-processed Al-doped ZnO TCOs7The Effect of Post Deposition Treatment on Properties of ALD Al-Doped ZnO Films13Novel Mg‐ and Ga‐doped ZnO/Li‐Doped Graphene Oxide Transparent Electrode/Electron‐Transporting Layer Combinations for High‐Performance Thin‐Film Solar Cells12Synthesis and characterization of Al-doped ZnO and Al/F co-doped ZnO thin films prepared by atomic layer deposition25Research and Application Progress of Conductive Films in Energy Storage Devices20The improved properties of solution-based InGaSnO (IGTO) thin film transistor using the modification of InZnO (IZO) layer23Wet-chemical surface texturing of AZO substrate for improved perovskite solar cells10Grass-like alumina enhances transmittance and electrical conductivity of atomic layer deposited Al-doped ZnO for thermoelectric and TCO applications10An Aqueous Process for Preparing Flexible Transparent Electrodes Using Non-Oxidized Graphene/Single-Walled Carbon Nanotube Hybrid Solution3CELLULOSE NANOFIBRILS - AN ANALYSIS OF THE ISOLATION METHODS0Insights into the reactivity and lithium plating mechanisms of ultra-thin metal oxide coatings for anode-free solid-state lithium metal batteries10Al Promotion of In 2 O 3 for CO 2 Hydrogenation to Methanol113Zinc Aluminum Oxide Encapsulation Layers for Perovskite Solar Cells Deposited Using Spatial Atomic Layer Deposition21A Cu-ZnO-Al2O3 catalyst with oxygen vacancy for efficient hydrodeoxygenation of lignin-derived guaiacol to hydrocarbons36Investigation of the role of oxygen vacancies in CuZn catalysts for the formation of higher alcohols from syngas22A generic approach for aligning liquid crystals using solution-processed 2D materials on ITO-free surfaces6Effects of alumina priming on the electrical properties of ZnO nanostructures derived from vapor-phase infiltration into self-assembled block copolymer thin films9Metal oxide-based LEDs and lasers1Regulating oxygen redox reactions in lithium-rich materials via an Al 2 O 3 -doped ZnO layer for enhanced stability and performance15Investigate the relationship between densification and grain size of IGZO target by phase‐field simulation3Study of silicon surface passivation by ZnOx/AlOx stack prepared using super-cycle approach in thermal ALD process5Ultrasonic cavitation-modulated nanocrystal facets growth of zinc-based oxide4P‐1.14: Effects of Active Layer Thickness on Performance of InZnO Transistors0Improved perovskite photostability via application of TiO2, ZnO and AZO thin films by pulsed laser deposition10Simple chemical solution deposition of Al2O3 dielectric layers for low-cost fabrication of transparent electronic devices0Ultra-Flexible, Breathable, and Robust PAN/MWCNTs/PANI Nanofiber Networks for High-Performance Wearable Gas Sensor Application55Unraveling the nature of local field distortion-induced dual electron-trapping centers for efficient photocatalytic fuel evolution30Atomic layer deposition of Al-doped ZnO nanomembrane with in situ monitoring3Hybrid bilayers of carbon/NiBr 2 anchoring on FeSiB surface for enhanced microwave absorption coupling with smart discoloration37Interlinking the Fe doping concentration, optoelectronic properties, and photocatalytic performance of ZnO nanostructures19Microstructural and optoelectronic properties of sputtered Al:ZnO films and Al:ZnO/Cu bilayer structures: Effects of substrate and Cu thickness9Saturation degree in dopant monolayers as modulator of Al-doping of ZnO by the Atomic Layer Deposition-supercycle approach2Saturation Mobility of 100 cm 2 V –1 s –1 in ZnO Thin-Film Transistors through Quantum Confinement by a Nanoscale In 2 O 3 Interlayer Using Spray Pyrolysis43Investigation of structures and electrochemical performances of synergetic ZnO-Al2O3 nanolaminated coatings for Li-rich layered oxide cathodes14Highly Enhanced Schottky Barrier Heights in Source/Drain Contacts of Igzo Fets Using Azo-Based Mis Structures with Post-Interlayer Deposition Annealing (Pida)0Atomic Layer-deposited flexible ZnO transparent electrodes with Zn-Al-O interface for electrochromic devices9

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  1. Multipurpose surface functionalization on AZ31 magnesium alloys by atomic layer deposition: tailoring the corrosion resistance and electrical performance

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  2. van der Waals epitaxial two-dimensional CdS x Se (1−x) semiconductor alloys with tunable-composition and application to flexible optoelectronics

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  35. High-performance flexible transparent conductive thin films on PET substrates with a CuM/AZO structure

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  43. Impact of Ho-Ni substitution on structural, morphological and dielectrical characteristics of BaFe12O19 M-type hexagonal ferrite

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    Journal of Alloys and Compounds · 2020

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  47. Molecular Patching Engineering to Drive Energy Conversion as Efficient and Environment‐Friendly Cell toward Wireless Power Transmission

    Advanced Functional Materials · 2020

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  48. The Effects of Post Annealing Process on the Electrical Performance and Stability of Al-Zn-O Thin-Film Transistors

    IEEE Electron Device Letters · 2020

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  49. Zinc Oxide Films with High Transparency and Crystallinity Prepared by a Low Temperature Spatial Atomic Layer Deposition Process

    Nanomaterials · 2020

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  50. Energy Level-Graded Al-Doped ZnO Protection Layers for Copper Nanowire-Based Window Electrodes for Efficient Flexible Perovskite Solar Cells

    ACS Applied Materials & Interfaces · 2020

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