RESEARCH ARTICLE · Micromachines · 2026
Mechanisms of Film-Formation-Related Defects in EUV Photoresists for Sub-3 nm Nodes and Synergistic Materials–Process–Intelligence Co-Optimization
Jianmin Wu, Yanqing Luo, J Hu, S S Li, Sen Cai, Tiedong Cheng, Ping Zhang, P LI, Shengkun Jiang, Ziqiang Liu, Guitai Wu, Sergey Mikhailovich Kopytov, Jie Yang
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