RESEARCH PAPER · ACS Applied Materials & Interfaces · 2026
Machine Learning-Enabled In Situ Diagnostics for Intelligent Plasma-Based Semiconductor Manufacturing: A Review
Minji Kang, Seongho Kim, Eunseo Go, Sooji Byun, Donghyun Cho, Taeho Kim, Hongjae Kang, Jinhyoung Lee, Minkyung Ko, Nari Jeon, Min Sup Choi, Hyeong‐U Kim
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