RESEARCH PAPER · Chemistry of Materials · 2026
Illuminating the Challenges in Extreme Ultraviolet Patterning Materials
Patrick P Naulleau, Stacey F. Bent, Samuel M. Blau, Brett A. Helms, Frances A. Houle, Oleg Kostko, Kyunghyeon Lee, Paul F. Nealey, Christopher Kemper Ober, Dahyun Oh, Rachel A. Segalman, Emma Vargo, Cheng Wang, Qi Zhang, Ricardo Ruiz
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