RESEARCH PAPER · Applied Surface Science Advances · 2026
Patternable laser-oxidized Ta2O5 dielectric and TaS2 contact for optimizing subthreshold swing of MoS2 field-effect transistors
Kuan-Cheng Lu, Pen-Yuan Shih, Pin-Hsien Lin, Shih-Hao Wu, Kimitoshi Kōno, Wen-Bin Jian, Yu-Han Lin, Yo-Yao Ho, Ching‐Hwa Ho, Shin-Yuan Wang, Chao-Hsin Chien, Ching‐Yu Chiang, Shu-Jui Chang, Yu-Che Huang, Kenji Watanabe, Takashi Taniguchi, Kazuhito Tsukagoshi, Chenming Calvin Hu
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