RESEARCH ARTICLE · International Journal of Extreme Manufacturing · 2025
Scalable and reproducible sub-5 nm manufacturing for next-generation devices
Lijuan Chen, Sihai Luo, Dongxu Yang, Qi Yuan, Yingfang Zhang, Bai Tao Sun, Jian Lv, Xiaoliang Chen, Hongmiao Tian, Xiangming Li, Fenggang Ren, Yi Lv, Stefan Alexander Maier, Jinyou Shao
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