RESEARCH PAPER · Nature Communications · 2025
Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator
Tom Vanackere, Artur Hermans, Ian Christen, Christopher Panuski, Mark Dong, Matthew Zimmermann, Hamza Raniwala, Andrew Jay Leenheer, Matt Eichenfield, Gerald N. Gilbert, Dirk Englund
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