RESEARCH PAPER · Journal of Materials Chemistry C · 2025
Machine learning-driven soft plasma etching for precision structuring of biofunctional organic semiconductor films
Wei Wang, Mengna Dai, Xin Zou, Yu Zeng, Zile Zhao, Dai Linfeng, Qingqing Xie, Kai Lun Yao, Shuqi Zhang, Yuping Quan, Yue Hu, Meng Gou, Zeyuan Gao, Zhenyan Wang, Li Xu, Lihong Qi, Kai‐Feng Shen, Yuheng Wang, Yaqing Zhang
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