RESEARCH PAPER · Advanced Electronic Materials · 2025
Nonequilibrium Nitrogen Spike Annealing for Crystallization Enhancement Achieves High Mobility and Reliability in IGO TFTs
Kuo Zhang, Jiayi Wang, Ziheng Bai, Chunyu Zhang, Tong Yu, Yang J. Xu, Nannan You, Rui Chen, Zhicheng Wu, Di Geng, Guanhua Yang, Shengkai Wang, Ling Li, Ming Liu
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