RESEARCH PAPER · Materials Today Communications · 2025
From target to film: The crucial role of AZO target grain size in sputtered thin film properties
Xina Liang, Xiaokai Liu, Xiaokai Liu, Wenyu Zhang, Huiyu Zhang, Hetao Zhao, Yongge Zhao, Yuan-Pei Yang, Jianhang Zhang, Benshuang Sun, Yang Liu, Jilin He
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