RESEARCH PAPER · Optics Continuum · 2025
Design and optical performance evaluation of a variable attenuator in a lithography illumination system
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Analytical model of excimer laser homogenizer using dual-microlens arrays
Optics Express · 2025-12-02
Zhiyuan Shen, Yuejing Qi, Chaoho Ouyang, Jiani Su, Jing Ma, Wei Qi
Read original paper ↗ ·Optics Continuum recognizes the 2025 Best Paper Prize winners: editorial
Optics Continuum · 2026-09-03
Judith M. Dawes, Gualtiero Nunzi Conti
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