RESEARCH PAPER · IEEE Electron Device Letters · 2025
Stabilizing ALD Ultrathin In₂O₃ TFTs Under High Humidity Ambient by an Added IGZO Layer
Shanshan Ju, Jinxiong Li, Yupu Tang, Wei Ping Qian, Fangxing Zhang, Jianzhang Zhu, Xu Tian, Songjie Yang, Lining Zhang, Lei Lü, Shengdong Zhang, Xinwei Wang
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