RESEARCH PAPER · Sensors · 2024
Data-Driven Analysis of High-Temperature Fluorocarbon Plasma for Semiconductor Processing
Sung Kyu Jang, Woosung Lee, Ga In Choi, Jihun Kim, Minji Kang, Seong-Ho Kim, Jong Hyun Choi, Seul-Gi Kim, Seoung‐Ki Lee, Hyeong‐U Kim, Hyeongkeun Kim
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