RESEARCH PAPER · Applied Surface Science · 2024
Enhanced Chemical Mechanical Polishing (Cmp) Performance of Porous Self-Assembled Spherical Cerium Oxide Via Re(La/Pr/Nd) Doping
Zhenyu Zhang, Ning Wang, Xingzi Wang, Zheng Zhao, Chen Dong, Xianmin Tan, Yuanyuan Zheng, Zongyu Feng, Xiangxi Zhong, Juanyu Yang, Xiaowei Huang
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