RESEARCH PAPER · Ceramics International · 2024
Low temperature (002)-oriented zinc oxide films prepared using ozone-based spatial atomic layer deposition
Wenbin Wu, Chia‐Hsun Hsu, Xin-Xiang Yue, Wenzhi Zhang, Jing Zhang, Xiaoying Zhang, Peng Fei Gao, Wan-Yu Wu, Dong‐Sing Wuu, Feng‐Min Lai, Shui‐Yang Lien
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