RESEARCH PAPER · APL Materials · 2024
Machine learning investigation of high-k metal gate processes for dynamic random access memory peripheral transistor
Namyong Kwon, Joonho Bang, Won Ju Sung, Jung Hoon Han, Dongin Lee, Ilwoo Jung, Se Guen Park, Hyodong Ban, Sangjoon Hwang, Won Yong Shin, Jinhye Bae, Dongwoo Lee
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