RESEARCH PAPER · Thin Solid Films · 2023
Crystalline and optical properties of AlN films with varying thicknesses (0.4-10 µm) grown on sapphire by metalorganic chemical vapor deposition
Zhe Chuan Feng, Hong Yang, Junhua Yin, Yao Liu, Feng Wu, Jiangnan Dai, Changqing Chen, Kaiyan He, Lingyu Wan, Vishal G. Saravade, Jeffrey Yiin, Benjamin D. B. Klein, Ian T. Ferguson
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