RESEARCH PAPER · Journal of Applied Polymer Science · 2023
Green deep‐UV photoresist based on chitosan for microelectronics
Olha Sysova, Paule Durin, Corinne Gablin, Didier Léonard, Alexandre Téolis, Stéphane Trombotto, Thierry Delair, Dominique Berling, Isabelle Servin, Raluca Tiron, Arnaud Bazin, Jean‐Louis Leclercq, Yann Chevolot, Olivier Soppera
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