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RESEARCH PAPER · Applied Surface Science · 2023

Carbon ion self–sputtering attained by sublimation of hot graphite target and controlled by pulse injection of a neon–helium gas mixture

Bartosz Wicher, Rafał Choduń, Grzegorz Greczyński, Artur Lachowski, Marek Trzciński, Oleksandr V. Pshyk, Krystian Król, Krzysztof Kulikowski, Łukasz Skowroński, Krzysztof Zdunek

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Carbon ion self–sputtering attained by sublimation of hot graphite target and controlled by pulse injection of a neon–helium gas mixtureOriginalOptical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique16Superhard oxidation-resistant Ti1-xAlxBy thin films grown by hybrid HiPIMS/DCMS co-sputtering diboride targets without external substrate heating16Surface temperature of a 2 in. Ti target during DC magnetron sputtering5Synergistic Effect of He for the Fabrication of Ne and Ar Gas-Charged Silicon Thin Films as Solid Targets for Spectroscopic Studies3Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions4Glows, arcs, ohmic discharges: An electrode-centered review on discharge modes and the transitions between them62Influence of carbon ionization increment by adding ne on the bonding, electrical, and tribological properties of carbon thin films deposited by HiPIMS2Comparation on the tribological properties of textured design between Si/Ni-DLC and Si/Ta-DLC composite films7Study on the effect of substrate temperature on the infrared transmittance of DLC films fabricated by magnetron sputtering0

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  1. Optical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique

    Materials · 2023-11-06

    Łukasz Skowroński, Rafał Choduń, Marek Trzciński, Krzysztof Zdunek

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  2. Superhard oxidation-resistant Ti1-xAlxBy thin films grown by hybrid HiPIMS/DCMS co-sputtering diboride targets without external substrate heating

    Materials & Design · 2024-02-01

    Bartosz Wicher, Oleksandr V. Pshyk, Xun Li, Babak Bakhit, Vladyslav Rogoz, Ivan Petrov, Lars Hultman, Grzegorz Greczyński

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  3. Surface temperature of a 2 in. Ti target during DC magnetron sputtering

    Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2024-03-22

    Carlos David Ramos, Daniela S. Jacobo-Mora, J. Cruz, Stephen Muhl

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  4. Synergistic Effect of He for the Fabrication of Ne and Ar Gas-Charged Silicon Thin Films as Solid Targets for Spectroscopic Studies

    Nanomaterials · 2024-04-21

    Asunción Fernández, Vanda Godinho, José Avila, M. C. Jiménez de Haro, Dirk Hufschmidt, Jennifer López-Viejobueno, Gabriel Eduardo Almanza-Vergara, Francisco Javier Ferrer, Julien L. Colaux, Stéphane Lucas, M. C. Asensio

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  5. Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions

    Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2024-06-12

    Yu.V. Kovtun, Alexandr S. Kuprin, Viktoriya Podhurska

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  6. Glows, arcs, ohmic discharges: An electrode-centered review on discharge modes and the transitions between them

    Applied Physics Reviews · 2024-07-19

    André Anders

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  7. Influence of carbon ionization increment by adding ne on the bonding, electrical, and tribological properties of carbon thin films deposited by HiPIMS

    Scientific Reports · 2024-09-27

    César Daniel Rivera-Tello, Francisco Javier Flores‐Ruiz, Jonathan Perez Alvarez, J. Leon, I. Farías, L. Flores-Cova, Martín Flores

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  8. Comparation on the tribological properties of textured design between Si/Ni-DLC and Si/Ta-DLC composite films

    Vacuum · 2025-01-04

    Yanxia Wu, Yanjie Xu, Ke Li, Bang Shi, Ying Liu, Y.L. Gong, Shengwang Yu

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  9. Study on the effect of substrate temperature on the infrared transmittance of DLC films fabricated by magnetron sputtering

    Optics Express · 2026-02-12

    Jiandong kang, Junru Wang, yanan Cao, Xiangyin Lv, jiao peng, Zongsheng Chen, Zhigang Li, Yue Wang, Yajing Chang, Liping Liu

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