RESEARCH PAPER · Journal of Industrial and Engineering Chemistry · 2022
Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization
Seho Sun, Kangchun Lee, Ganggyu Lee, Yehwan Kim, Sungmin Kim, Junha Hwang, Hyungoo Kong, Kyung Yoon Chung, Ghulam Ali, Taeseup Song, Ungyu Paik
Read original paper ↗See where this research leads.
A citation map has not been saved for this paper yet.
The paper record is available below. Preparing a network uses the existing account and source-allowance controls.
Papers that cite this work
No saved citation network is available; this does not mean the paper has no citations.
