RESEARCH PAPER · ACS Applied Materials & Interfaces · 2021
Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers
Gül Dogan, Sinan Özgün Demir, Rico Gutzler, Herbert Gruhn, Cem Balda Dayan, Umut T. Sanli, Christian Silber, Utku Çulha, Metin Sitti, Gisela Schütz, Corinne Grévent, Kahraman Keskinbora
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