RESEARCH PAPER · International Journal of Extreme Manufacturing · 2021
Achieving a sub-10 nm nanopore array in silicon by metal-assisted chemical etching and machine learning
Yun Chen, Yanhui Chen, Junyu Long, Dachuang Shi, Xin Chen, Maoxiang Hou, Jian Gao, Huilong Liu, Yunbo He, Bi Fan, Ching‐Ping Wong, Ni Zhao
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