RESEARCH ARTICLE · Chemistry of Materials · 2021
Resolving the Evolution of Atomic Layer-Deposited Thin-Film Growth by Continuous In Situ X-Ray Absorption Spectroscopy
Xiaohui Qu, Danhua Yan, Ruoshui Li, Jiajie Cen, Chenyu Zhou, Wenrui Zhang, Deyu Lu, Klaus Attenkofer, Darío J. Stacchiola, Mark S. Hybertsen, Eli Stavitski, Mingzhao Liu
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