RESEARCH PAPER · Journal of Micro/Nanopatterning Materials and Metrology · 2020
Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering
Read original paper ↗See where this research leads.
A citation map has not been saved for this paper yet.
Open in your workspace →Open your workspace to prepare the citation network.
The paper record is available below. Preparing a network uses the existing account and source-allowance controls.
Papers that cite this work
No saved citation network is available; this does not mean the paper has no citations.