RESEARCH PAPER · Nature Electronics · 2019
Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom
Mirko Holler, Michal Odstrčil, Manuel Guizar‐Sicairos, Maxime Lebugle, Elisabeth A. Müller, Simone Finizio, G. Tinti, Christian Dávid, Joshua Zusman, Walter Unglaub, Oliver Bunk, Jörg Raabe, Anthony F. J. Levi, G. Aeppli
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