RESEARCH PAPER · Japanese Journal of Applied Physics · 2019
Electron beam metrology for advanced technology nodes
Gian Francesco Lorusso, Naoto Horiguchi, Jürgen Bömmels, Christopher J. Wilson, Geert Van den Bosch, Gouri Sankar Kar, Takeyoshi Ohashi, Takumichi Sutani, Ryota Watanabe, Yoshikata Takemasa, Masami Ikota
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