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RESEARCH PAPER · ACS Applied Materials & Interfaces · 2019

Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition

Hyo Jin K. Kim, Kirsten E. Kaplan, Peter Schindler, Shicheng Xu, Martin M. Winterkorn, David B. Heinz, Timothy S. English, J. Provine, Fritz B. Prinz, Thomas William Kenny

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Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer DepositionOriginalExtension of the Rotating Disk Electrode Method to Thin Samples of Non-Disk Shape7Calorimètre miniaturisé innovant pour la mesure de l'énergie déposée par les interactions rayonnements nucléaires/matière en réacteur de recherche : de sa conception à son étude en laboratoire0Stable and Active Oxygen Reduction Catalysts with Reduced Noble Metal Loadings through Potential Triggered Support Passivation6Large temperature coefficient of resistance in atomically thin two-dimensional semiconductors40Role of surface coverage of alumina with Pt nanoparticles deposited by laser electrodispersion in catalytic CO oxidation20Measuring the Microwave Conductivity of Platinum Ultrathin Films2Determination of the temperature coefficient of resistance from micro four-point probe measurements18Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition10Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes8Study of Pt growth on Si, Al2O3, Au, and Ni surfaces by plasma enhanced atomic layer deposition3Conductance of ultrathin Pt films1Ferroelectric B-Site Modified Bismuth Lanthanum Titanate Thin Films for High-Efficiency PV Systems3Formation of ultra-thin NiGe film with single crystalline phase and smooth surface0Dimension Control of Platinum Nanostructures by Atomic Layer Deposition: From Surface Chemical Reactions to Applications18Inertness and Other Properties of Thin Ruthenium Electrodes in ReRAM Applications2Evaluating an electric field modulated plasma enhanced atomic layer deposition of platinum layers on different substrates4Thermal conductivity data acquisition using microfluidics and cheminformatics0Plasma-Enhanced Atomic Layer-Deposited Ti,Si-Doped ZrO 2 Antiferroelectric Films for Energy Storage Capacitors9Efficient ultrafast field-driven spin current generation for spintronic terahertz frequency conversion28From Nano to Giant Grains: Optimizing Pt Thermistors for Microbolometers1Orotic acid-capped Tb( iii )-doped calcium sulphate nanorods for the selective detection of tryptophan0Development of a Microheater with a Large Heating Area and Low Thermal Stress in the Heating Area9Suspended Silicon Nitride Platforms for Thermal Sensing Applications in the Limit of Minimized Membrane Thickness5Programmable Analog Circuits with Neuromorphic Nanostructured Platinum Films10Selective Surface Passivation for Ultrathin and Continuous Metallic Films via Atomic Layer Deposition12Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films3Enhancing Chemical Stability of Pt Ultrathin Films on Substrates by Controlled Intermixing of Pt‐Zn at Interface4Highly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe30Low-power hydrogen sensing with a nickel-silicide nanosheet formed on SiO 20Advances in area-selective atomic layer deposition: surface chemistry, challenges, and future perspectives1Performance optimization of MEMS silicon substrate hot film gas flow sensors via platinum film annealing0Optimization of film thickness and annealing for bending-stable flexible platinum thin-film temperature sensors0Disentangling Degradation Mechanisms of Noble Metal-Coated Titanium Porous Transport Layers for Water Electrolyzers0Capacitance enhancement of Ru/ZrO2/Ru metal–insulator–metal capacitors via the annealing-induced densification of the top Ru electrode0

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34 direct citing papers saved.

  1. Extension of the Rotating Disk Electrode Method to Thin Samples of Non-Disk Shape

    Journal of The Electrochemical Society · 2019-01-01

    Marcus D. Pohl, Sandra Haschke, Daniel Göhl, Olga I. Kasian, Julien Bachmann, Karl J. J. Mayrhofer, Ioannis Katsounaros

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  2. Calorimètre miniaturisé innovant pour la mesure de l'énergie déposée par les interactions rayonnements nucléaires/matière en réacteur de recherche : de sa conception à son étude en laboratoire

    Unknown journal · 2019-12-17

    Adrien Volte

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  3. Stable and Active Oxygen Reduction Catalysts with Reduced Noble Metal Loadings through Potential Triggered Support Passivation

    ChemElectroChem · 2020-03-12

    Daniel Göhl, Holger Rueß, Stefanie Schlicht, Alexandra Vogel, Michael Rohwerder, Karl J. J. Mayrhofer, Julien Bachmann, Yuriy Román‐Leshkov, Jochen M. Schneider, Marc Ledendecker

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  4. Large temperature coefficient of resistance in atomically thin two-dimensional semiconductors

    Applied Physics Letters · 2020-05-18

    Asir Intisar Khan, Pedram Khakbaz, Kevin A. Brenner, Kirby K. H. Smithe, Michal J. Mleczko, David Esseni, Eric Pop

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  5. Role of surface coverage of alumina with Pt nanoparticles deposited by laser electrodispersion in catalytic CO oxidation

    Applied Surface Science · 2020-08-27

    Elena Vladimirovna Golubina, Tatiana N. Rostovshchikova, Ekaterina Sergeevna Lokteva, Konstantin Igorevich Maslakov, Sergey A. Nikolaev, Marina I. Shilina, Serguei A. Gurevich, Vladimir M. Kozhevin, D. A. Yavsin, Elena M. Slavinskaya

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  6. Measuring the Microwave Conductivity of Platinum Ultrathin Films

    Doklady Physics · 2020-12-01

    В. Г. Андреев, Vladimir A. Vdovin, P. S. Glazunov, A. B. Vasilev, Ю.В. Пинаев, I. A. Khorin, В. А. Черепенин

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  7. Determination of the temperature coefficient of resistance from micro four-point probe measurements

    Journal of Applied Physics · 2021-04-27

    Thomas A. Marangoni, Benny Guralnik, Kasper A. Borup, Ole Per Hansen, Dirch Hjorth Petersen

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  8. Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition

    ACS Applied Materials & Interfaces · 2021-04-29

    Heungdong Kwon, Christopher Perez, Hyojin K. Kim, Mehdi Asheghi, Woosung Park, Kenneth E. Goodson

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  9. Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes

    Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021-05-11

    Antony Premkumar Peter, Takayama Tomomi, Ebisudani Taishi, Shiba Eiichiro, Alfonso Sepúlveda, Timothee Blanquart, Yosuke Kimura, Sujith Subramanian, S. Baudot, Basoene Briggs, Anshul Gupta, Anabela Veloso, Elena Capogreco, Hans W. Mertens, Johan Meersschaut, Thierry S. Conard, Praveen Dara, Jef Geypen, Gerardo Martínez, Dmitry Batuk, S. Demuynck, Pierre Morin

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  10. Study of Pt growth on Si, Al2O3, Au, and Ni surfaces by plasma enhanced atomic layer deposition

    Journal of Applied Physics · 2021-09-14

    Mingming Yan, Tianchong Zhang, Bo Wang, Jing Liu, Xiaoxiao Liang, Yuanze Xu, Futing Yi

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  11. Conductance of ultrathin Pt films

    Journal of the Korean Physical Society · 2022-02-14

    Changjin Yun, Jiho Kim, Min‐gu Kim, Dongseuk Kim, Chanyong Hwang, B. C. Lee, Kungwon Rhie

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  12. Ferroelectric B-Site Modified Bismuth Lanthanum Titanate Thin Films for High-Efficiency PV Systems

    Coatings · 2022-09-09

    Rui Tang, Rui He, Sangmo Kim, Chung Wung Bark

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  13. Formation of ultra-thin NiGe film with single crystalline phase and smooth surface

    Japanese Journal of Applied Physics · 2022-12-19

    Shunsuke Nishimura, Noriyuki Taoka, Akio Ohta, Katsunori Makihara, Seiichi Miyazaki

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  14. Dimension Control of Platinum Nanostructures by Atomic Layer Deposition: From Surface Chemical Reactions to Applications

    Chemistry of Materials · 2023-03-14

    Kim-Hue Thi Dinh, Huong T. T. Ta, Ngoc Linh Nguyen, Viet Thong Le, Việt Hương Nguyễn, Hao Van Bui

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  15. Inertness and Other Properties of Thin Ruthenium Electrodes in ReRAM Applications

    IntechOpen eBooks · 2023-03-27

    Amrita Chakraborty, Mohammad Al-Mamun, Marius K Orlowski

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  16. Evaluating an electric field modulated plasma enhanced atomic layer deposition of platinum layers on different substrates

    Journal of Applied Physics · 2023-10-17

    Mingming Yan, Tianchong Zhang, Bo Wang, Jing Liu, Xiaoxiao Liang, Yuanze Xu, Futing Yi

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  17. Thermal conductivity data acquisition using microfluidics and cheminformatics

    Unknown journal · 2023-10-19

    Rosa Moreno Jimenez

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  18. Plasma-Enhanced Atomic Layer-Deposited Ti,Si-Doped ZrO 2 Antiferroelectric Films for Energy Storage Capacitors

    ACS Applied Electronic Materials · 2023-10-26

    Guang Zheng, Yu-Li He, Bao Zhu, Xiaohan Wu, David Wei Zhang, Shi‐Jin Ding

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  19. Efficient ultrafast field-driven spin current generation for spintronic terahertz frequency conversion

    Nature Communications · 2023-11-02

    Igor E. Ilyakov, Arne Brataas, Thales V. A. G. de Oliveira, Alexey N. Ponomaryov, Jan‐Christoph Deinert, Olav Hellwig, J. Faßbender, Jürgen Lindner, Ruslan Salikhov, Sergey Kovalev

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  20. From Nano to Giant Grains: Optimizing Pt Thermistors for Microbolometers

    Applied Materials Today · 2024-01-01

    Atasi Dan, Erica Antunes, Christopher S. Yung, Nathan A. Tomlin, Michelle S. Stephens, John H. Lehman

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  21. Orotic acid-capped Tb( iii )-doped calcium sulphate nanorods for the selective detection of tryptophan

    Nanoscale · 2024-01-01

    Jaydeep Kumar, Neha Yadav, Viplove Mishra, Heramba V. S. R. M. Koppisetti, Avishek Roy, Antarip Mitra, Venkataramanan Mahalingam

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  22. Development of a Microheater with a Large Heating Area and Low Thermal Stress in the Heating Area

    Micromachines · 2024-01-12

    Tao Zhang, Zequan Pan, Chunhua Zhang, Liuguang Xiong, Chunmei Yang, Jian Zhang, Mengjiao Shi, Yuhang Wang, Wen Qu

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  23. Suspended Silicon Nitride Platforms for Thermal Sensing Applications in the Limit of Minimized Membrane Thickness

    Journal of Microelectromechanical Systems · 2024-05-15

    Ethan A. Scott, Hwijong Lee, John N. Nogan, Don Bethke, Peter Anand Sharma, Patrick E. Hopkins, Tzu‐Ming Lu, Charles Thomas Harris

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  24. Programmable Analog Circuits with Neuromorphic Nanostructured Platinum Films

    Advanced Electronic Materials · 2024-08-19

    Stefano Radice, Filippo Profumo, Francesca Borghi, Andrea Falqui, Paolo Milani

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  25. Selective Surface Passivation for Ultrathin and Continuous Metallic Films via Atomic Layer Deposition

    Nano Letters · 2025-03-03

    Han Kim, Taeseok Kim, Min‐Seok Kim, Jihoon Jeon, Gwang Min Park, Sung‐Chul Kim, Sung-Chul Kim, Sung Ok Won, Ryosuke Harada, Sangtae Kim, Sangtae Kim, Seong Keun Kim, Seong Keun Kim

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  26. Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films

    Advanced Science · 2025-05-28

    Yeseul Son, Sang Bok Kim, Sang Bok Kim, Debananda Mohapatra, Taehoon Cheon, Soo‐Hyun Kim, Soo‐Hyun Kim

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  27. Enhancing Chemical Stability of Pt Ultrathin Films on Substrates by Controlled Intermixing of Pt‐Zn at Interface

    Advanced Engineering Materials · 2025-07-09

    Peela Lasya, Daljin Jacob, Vinod Sarky, Allamula Ashok, Sirish Pandiri, Parasuraman Swaminathan, Satyesh Kumar Yadav

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  28. Highly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe3

    The Journal of Physical Chemistry C · 2025-07-17

    Hao Van Bui, Fabio Grillo, Dieu Minh Nguyen, M. Dang, Antonius A. I. Aarnink, Rob A. M. Wolters, J. Ruud van Ommen, Alexey Yu Kovalgin

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  29. Low-power hydrogen sensing with a nickel-silicide nanosheet formed on SiO 2

    Japanese Journal of Applied Physics · 2025-11-12

    Ryota Watanabe, Keisuke Kimura, Naoki Hattori, Katsunori Makihara, Yusuke Ichino, Yoshiyuki Seike, Tatsuo Mori, Noriyuki Taoka

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  30. Advances in area-selective atomic layer deposition: surface chemistry, challenges, and future perspectives

    Coordination Chemistry Reviews · 2026-03-10

    Hyosik Jo, Yunseok Kim, Seulwon Choi, Ilhan Yoo, Minji Han, Jung‐El Ryu, Hwanyeol Park

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  31. Performance optimization of MEMS silicon substrate hot film gas flow sensors via platinum film annealing

    Applied Physics A · 2026-03-30

    Lei Zhao, Changkun Zhu, Xiaoli Wang, Xiaoqing Jiang, Chu Cheng, Jie Zou, Jiawen Jian

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  32. Optimization of film thickness and annealing for bending-stable flexible platinum thin-film temperature sensors

    Flexible and Printed Electronics · 2026-04-10

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  33. Disentangling Degradation Mechanisms of Noble Metal-Coated Titanium Porous Transport Layers for Water Electrolyzers

    ACS Applied Materials & Interfaces · 2026-06-09

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  34. Capacitance enhancement of Ru/ZrO2/Ru metal–insulator–metal capacitors via the annealing-induced densification of the top Ru electrode

    Applied Surface Science · 2026-06-14

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