RESEARCH PAPER · Semiconductor Science and Technology · 2018
Performance boost using spacer-confined cavity for advanced FinFET technology
Hsien-Ching Lo, Jianwei Peng, Hui Zhan, El Mehdi Bazizi, Wei Hong, Edward Reis, Pei Tang Zhao, Yue Hu, Yan Ping Shen, Churamani Gaire, Yong Jun Shi, Yi Peng Qi, D. Zhou, Yanzhen Wang, Zhe Chen, Owen Hu, Srikanth B. Samavedam
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