RESEARCH PAPER · International Conference on Solid-State Sensors, Actuators and Microsystems · 2017
Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density
Pai Lu, Kang Du, Per Alfred Øhlckers, Einar Halvorsen, Lutz Muller, Steffen Leopold, Martin Hoffmann, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila, Xuyuan Chen
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