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RESEARCH PAPER · MRS Bulletin · 2000

Chemical and Thin-Film Strategies for New Transparent Conducting Oxides

Arthur J Freeman, Kenneth Reinhard Poeppelmeier, Thomas O. Mason, R. P. H. Chang, Tobin Jay Marks

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Chemical and Thin-Film Strategies for New Transparent Conducting OxidesOriginalA Combinatorial Approach to TCO Synthesis and Characterization8Next-Generation Transparent Conducting Oxides for Photovoltaic Cells: an Overview15Highly conductive epitaxial CdO thin films prepared by pulsed laser deposition358Indium-cadmium-oxide films having exceptional electrical conductivity and optical transparency: Clues for optimizing transparent conductors138Modifications of c-Si/a-Si:H/indium tin oxide heterostructures upon thermal annealing6Molybdenum-doped indium oxide transparent conductive thin films81Progress in high work function TCO OLED anode alternatives and OLED nanopixelation79Combinatorial studies of Zn-Al-O and Zn-Sn-O transparent conducting oxide thin films130DOE/NREL Fundamental and Exploratory Research into Solar Cells: Preprint0First-principles calculations for understanding high conductivity and optical transparency in InxCd1−xO films51Transparent and conducting ITO films: new developments and applications995Synthesis and Characterization of Mesoporous Indium Tin Oxide Possessing an Electronically Conductive Framework96Inter- and Intramolecular Spin Transfer in Molecular Magnetic Materials. Solid-State NMR Spectroscopy of Paramagnetic Metallocenium Ions48Highly conductive and transparent Ti-doped zinc oxide thin films1Ink-Jet Methods in0Ink-Jet Methods in Combinatorial Materials Synthesis5Epi-n-ZnO/〈100〉 Si, GaAs and InP by L-MBE: a novel approach for III–V devices9Improved Transparent Conducting Oxides for Photovoltaics: Final Research Report, 1 May 1999--31 December 20021Influence of shallow core-level hybridization on the electronic structure of post-transition-metal oxides studied using soft X-ray emission and absorption123DOE/NREL fundamental and exploratory research into solar cells1Epitaxial lattice matching between epi-n-IZO thin films and 〈100〉 Si, GaAs and InP wafers with out any buffer layers by L-MBE technique: a novel development for III–V opto-electronic devices11Basic materials physics of transparent conducting oxides417Epi-n-IZO thin films/〈100〉 Si, GaAs and InP by L-MBE––a novel feasibility study for SIS type solar cells17Electrical and optical properties of highly conducting CdO:F thin film deposited by sol–gel dip coating technique89Synthesis and photoluminescence studies on ZnO nanowires107Relationships among surface processing at the nanometer scale, nanostructure and optical properties of thin oxide films41Calculation of the electronic and optical properties of indium tin oxide by density functional theory143High-mobility transparent conducting Mo-doped In2O3 thin films by pulsed laser deposition104Structure and electrical properties of CdIn2O4 thin films sputtered at elevated substrate temperatures37The influence of Al doping on the electrical, optical and structural properties of SnO2transparent conducting films deposited by the spray pyrolysis technique134Electrical, optical and structural properties of Li-doped SnO2transparent conducting films deposited by the spray pyrolysis technique: a carrier-type conversion study126Properties of multilayer transparent conducting oxide films84Chemical and Structural Factors Governing Transparent Conductivity in Oxides92Effects of oxygen contents on the electrical and optical properties of indium molybdenum oxide films fabricated by high density plasma evaporation45New transparent conductors with the M7O12 ordered oxygen-deficient fluorite structure: from In4Sn3O12 to In5.5Sb1.5O1220Effects of H2 in indium–molybdenum oxide films during high density plasma evaporation at room temperature17Preparation and characterization of Ni–indium tin oxide cosputtered thin films for organic light-emitting diode application34Antimony and antimony–tin doped indium oxide, IAO and IATO: promising transparent conductors21Dopant Ion Size and Electronic Structure Effects on Transparent Conducting Oxides. Sc-Doped CdO Thin Films Grown by MOCVD136Synthesis, microstructure, and electrical properties of the delafossite compound CuGaO238Electronic Structure Studies of Main Group Oxides Possessing Edge-Sharing Octahedra: Implications for the Design of Transparent Conducting Oxides222Effect of the H2 Annealing on the Electrical Properties of In2O3-SnO2 Thin Films1The electrical, optical and structural properties of InxZn1−xOy(0 x 1) thin films by combinatorial techniques55High Resistivity Zinc Stannate As A Buffer Layer In CdS/CdTe Solar Cells0Properties of Indium Molybdenum Oxide Films Fabricated Via High-Density Plasma Evaporation at Room Temperature20Recent developments in the emerging field of crystalline p-type transparent conducting oxide thin films371The surface and materials science of tin oxide2565ZITO (ZnO-SnO2-In2O3 ) Transparent Conducting Oxides: Electrical and Optical Properties of DC Magnetron Sputtered Films1Properties of R.F. magnetron sputtered cadmium–tin–oxide and indium–tin–oxide thin films84Structural, electrical and optical properties of In2O3:Mo films deposited by spray pyrolysis38Large hexagonal arrays of aligned ZnO nanorods54A novel nano-architecture for ZnO thin films on Si, GaAs and InP single crystal wafers by L-MBE as value in nano-robotic (machining) device fabrication efforts9Transparent conducting oxide semiconductors for transparent electrodes2166Effect of annealing and lithium substitution on conductivity in nickel–cobalt oxide spinel films11Tight-Binding Quantum Chemical Calculations of Electronic Structures of Indium Tin Oxide11Development of a novel high optical quality ZnO thin films by PLD for III–V opto-electronic devices73Thermodynamics of self-assembly of ions in the ITO solid solution9Effect of Fluorine Doping on Semiconductor to Metal-Like Transition and Optical Properties of Cadmium Oxide Thin Films Deposited by Sol–Gel Process55Temperature dependent structural and optical properties of nanocrystallineCdO thin films deposited by sol–gel process36Progress in semiconducting oxide-based thin-film transistors for displays46Synthesis and characterization of aluminum-doped CdO thin films by sol–gel process190Growth mechanism and characterization of ZnO microbelts and self-assembled microcombs61Properties of transparent conductive In2O3:Mo thin films deposited by Channel Spark Ablation34The great potential of coupled substitutions in In2O3 for the generation of bixbyite-type transparent conducting oxides, In2−2xMxSnxO324Electrical and structural characteristics of non-stoichiometric Cu-based delafossites24Investigation of the Crystallization Mechanisms in Indium Molybdenum Oxide Films by Vacuum Annealing5Physico-chemical studies of indium tin oxide-coated fiber optic biosensors38Strategies for novel transparent conducting sol–gel oxide coatings67Design of Nanostructured Materials1Predicted electrical properties of modulation-doped ZnO-based transparent conducting oxides25Review on material properties of IZO thin films useful as epi-n-TCOs in opto-electronic (SIS solar cells, polymeric LEDs) devices80Combinatorial synthesis of Li-doped NiO thin films and their transparent conducting properties94Air annealing effects on the optical properties of ZnO–SnO2thin films deposited by a filtered vacuum arc deposition system25High optical quality IZO (In2Zn2O5) thin films by PLD – A novel development for III–V opto-electronic devices48Low-temperature nickel-doped indium tin oxide anode for flexible organic light-emitting devices3Highly conducting transparent nanocrystalline Cd1−xSnxS thin film synthesized by RF magnetron sputtering and studies on its optical, electrical and field emission properties15Structural and electrical properties of sputtered indium–zinc oxide thin films75Coupled substitutions in In2O3: New transparent conductors In2−xM2x/3Sbx/3O3 (M=Cu, Zn)9Influence of Zn doping on electrical and optical properties of multilayered tin oxide thin films40Top-emitting organic light-emitting diode using transparent conducting indium oxide layer fabricated by a two-step ion beam-assisted deposition32Magnetically Mediated Transparent Conductors: In2O3 Doped with Mo81Effect of substituted IIIB transition metals on electronic properties of indium oxide by first‐principles calculations9Physical properties of Dy and La doped SnO2 thin films prepared by a cost effective vapour deposition technique16Study of annealing time on sol–gel indium tin oxide films on glass28Effect of deposition conditions on the characteristics of ZnO–SnO2 thin films deposited by filtered vacuum arc23Effect of Indium-Oxide Deposited Using an Oxygen Ion-Beam-Assisted-Deposition to Top-Emitting Organic Light-Emitting Diodes2Low-voltage electro-optic modulator structure using transparent conducting oxide with high conductivity-loss ratio as electrodes1Vanadium Doped Antimony-Tin Oxide Nano-Sols and their Films Produced by a Sol-Coating Method1rf magnetron sputter deposition of transparent conducting Nb-doped TiO2 films on SrTiO3110Discovery-based design of transparent conducting oxide films347Electrical and optical properties of fluorine-doped CdO films deposited by ultrasonic spray pyrolysis44Optical and microstructural properties of p-type SrCu2O2: First principles modeling and experimental studies15Some structural properties of CdO:F films produced by ultrasonic spray pyrolysis method24Phase equilibria in the pseudo-binary In2O3–SnO2 system82Averaging of the electron effective mass in multicomponent transparent conducting oxides53Unconventional approaches to combine optical transparency with electrical conductivity17Electrical and optical properties of Al doped cadmium oxide thin films deposited by radio frequency magnetron sputtering187Novel transparent conducting sol–gel oxide coatings25Fabrication of transparent conducting amorphous Zn–Sn–In–O thin films by direct current magnetron sputtering44Twinned domains in epitaxial ZnO/SnO2-cosubstituted In2O3 thin films14Optical and transport phenomena in CdO:La films prepared by sol-gel method27Turn-on voltage reduction of organic light-emitting diode using a nickel-doped indium tin oxide anode prepared by single target sputtering9Phase stability, electronic structure, and optical properties of indium oxide polytypes233Influence of defects and processing parameters on the properties of indium tin oxide films on polyethylene napthalate substrate21Effects of fluorine doping on the structural properties of the CdO films deposited by ultrasonic spray pyrolysis51Bandgap widening in highly conducting CdO thin film by Ti incorporation through radio frequency magnetron sputtering technique131Electronic band structure and carrier effective mass in calcium aluminates40Electrical and optical properties of Al-doped ZnO–SnO2 thin films deposited by RF magnetron sputtering30Pulsed laser deposited Nb doped TiO2 as a transparent conducting oxide73Growth and physical properties of ZnxCd1−xO thin films prepared by spray pyrolysis technique26Tuning the Properties of Transparent Oxide Conductors. Dopant Ion Size and Electronic Structure Effects on CdO-Based Transparent Conducting Oxides. Ga- and In-Doped CdO Thin Films Grown by MOCVD76ZnO and Its Applications65Nanostructured p-Type Semiconducting Transparent Oxides: Promising Materials for Nano-Active Devices and the Emerging Field of “Transparent Nanoelectronics”5Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB2O4 and Delafossite ABO2 Thin Films for “Transparent Electronics”15Tuning the size and color of the p-type wide band gap delafossite semiconductor CuGaO2 with ethylene glycol assisted hydrothermal synthesis94Correlated transport and optical phenomena in Ga-doped CdO films53Fluorine Doped Tin Oxide Coatings - Over 50 Years and Going Strong25Magnetism and Phase Formation in the Candidate Dilute Magnetic Semiconductor System In2 − xCrxO3: Bulk Materials are Dilute Paramagnets17Transparent conductive oxide thin films of CdTe-doped indium oxide prepared by pulsed-laser deposition7Characterization of Transparent Conducting Oxide Surfaces Using Self-Assembled Electroactive Monolayers38Solvent-dependent growth of sprayed FTO thin films with mat-like morphology62Effect of thallium doping on the electrical and optical properties of CdO thin films41Influence of hydrogenation on the electrical and optical properties of CdO:Tl thin films18Structural, electrical, and optical absorption properties of La Cd1−O solid solution films obtained by sol–gel method11First-principles LDA+U studies of the In-doped ZnO transparent conductive oxide47Bandgap narrowing in CdO doped with europium96Solvothermal synthesis and properties control of doped ZnO nanoparticles113Optimized deposition and characterization of nanocrystalline magnesium indium oxide thin films for opto-electronic applications9Tungsten-doped tin oxide thin films prepared by pulsed plasma deposition33The Future of TCO Materials: Stakes and Challenges14Transparent conductive oxide materials: financial stakes and technological challenges10Nanoscale Writing of Transparent Conducting Oxide Features with a Focused Ion Beam16Influence of dysprosium doping on the electrical and optical properties of CdO thin films81Flexible organic light-emitting diodes consisting of a platinum doped indium tin oxide anode1Influence of annealing in nitrogen on the structural, electrical, and optical properties of CdO films doped with samarium29Conductive oxide thin films: Model systems for understanding and controlling surface plasmon resonance101Effect of fluorine doping on highly transparent conductive spray deposited nanocrystalline tin oxide thin films154Control and Characterization of the Structural, Electrical, and Optical Properties of Amorphous Zinc−Indium−Tin Oxide Thin Films87High mobility transparent conducting oxides for thin film solar cells459Characterization of CdO Thin Films Prepared By SILAR Deposition Technique42Au-Doped Indium Tin Oxide Ohmic Contacts to p-Type GaN4Electro-optic modulator with exceptional power-size performance enabled by transparent conducting electrodes15Tuning the properties of complex transparent conducting oxides: Role of crystal symmetry, chemical composition, and carrier generation103Preparation and characterization of aluminum-incorporated cadmium oxide films5Combining Optical Transparency with Electrical Conductivity: Challenges and Prospects15Organic Electro‐Optic Modulators with Substantially Enhanced Performance Based on Transparent Electrodes0Electrical, optical and structural properties of aluminum doped cadmium oxide thin films prepared by spray pyrolysis technique77Nanoscale Structure, Composition, and Charge Transport Analysis of Transparent Conducting Oxide Nanowires Written by Focused Ion Beam Implantation10Electrical and optical properties of In2O3:Mo thin films prepared at various Mo-doping levels41Structural, electrical and optical properties of Cd1−xGdxO nanocomposite thin films12

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  1. A Combinatorial Approach to TCO Synthesis and Characterization

    MRS Proceedings · 2001-01-01

    John D. Perkins, Dennis W. Readey, Jeff L. Alleman, Joe del Cueto, Xiaonan Li, T. J. Coutts, R. E. Stauber, Chris Duncan, David L. Young, Phil A. Parilla, Brian M. Keyes, Lynn Gedvilas, Davor Balzar, Qi Wang, David S. Ginley

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  2. Next-Generation Transparent Conducting Oxides for Photovoltaic Cells: an Overview

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  3. Highly conductive epitaxial CdO thin films prepared by pulsed laser deposition

    Applied Physics Letters · 2001-04-16

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  4. Indium-cadmium-oxide films having exceptional electrical conductivity and optical transparency: Clues for optimizing transparent conductors

    Proceedings of the National Academy of Sciences · 2001-06-19

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  5. Modifications of c-Si/a-Si:H/indium tin oxide heterostructures upon thermal annealing

    Journal of Applied Physics · 2001-12-15

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  6. Molybdenum-doped indium oxide transparent conductive thin films

    Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002-01-01

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  7. Progress in high work function TCO OLED anode alternatives and OLED nanopixelation

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  8. Combinatorial studies of Zn-Al-O and Zn-Sn-O transparent conducting oxide thin films

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  9. DOE/NREL Fundamental and Exploratory Research into Solar Cells: Preprint

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  10. First-principles calculations for understanding high conductivity and optical transparency in InxCd1−xO films

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  11. Transparent and conducting ITO films: new developments and applications

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  12. Synthesis and Characterization of Mesoporous Indium Tin Oxide Possessing an Electronically Conductive Framework

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  13. Inter- and Intramolecular Spin Transfer in Molecular Magnetic Materials. Solid-State NMR Spectroscopy of Paramagnetic Metallocenium Ions

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  14. Highly conductive and transparent Ti-doped zinc oxide thin films

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  15. Ink-Jet Methods in

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  16. Ink-Jet Methods in Combinatorial Materials Synthesis

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  17. Epi-n-ZnO/〈100〉 Si, GaAs and InP by L-MBE: a novel approach for III–V devices

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  18. Improved Transparent Conducting Oxides for Photovoltaics: Final Research Report, 1 May 1999--31 December 2002

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  19. Influence of shallow core-level hybridization on the electronic structure of post-transition-metal oxides studied using soft X-ray emission and absorption

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  20. DOE/NREL fundamental and exploratory research into solar cells

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  21. Epitaxial lattice matching between epi-n-IZO thin films and 〈100〉 Si, GaAs and InP wafers with out any buffer layers by L-MBE technique: a novel development for III–V opto-electronic devices

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  22. Basic materials physics of transparent conducting oxides

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  23. Epi-n-IZO thin films/〈100〉 Si, GaAs and InP by L-MBE––a novel feasibility study for SIS type solar cells

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  24. Electrical and optical properties of highly conducting CdO:F thin film deposited by sol–gel dip coating technique

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  25. Synthesis and photoluminescence studies on ZnO nanowires

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    D Banerjee, J. Y. Lao, D Z Wang, Jianyu Huang, Diane Michelle. Steeves, Brian R. Kimball, Zhi Feng Ren

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  26. Relationships among surface processing at the nanometer scale, nanostructure and optical properties of thin oxide films

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  27. Calculation of the electronic and optical properties of indium tin oxide by density functional theory

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  28. High-mobility transparent conducting Mo-doped In2O3 thin films by pulsed laser deposition

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  29. Structure and electrical properties of CdIn2O4 thin films sputtered at elevated substrate temperatures

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  30. The influence of Al doping on the electrical, optical and structural properties of SnO2transparent conducting films deposited by the spray pyrolysis technique

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  31. Electrical, optical and structural properties of Li-doped SnO2transparent conducting films deposited by the spray pyrolysis technique: a carrier-type conversion study

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  32. Properties of multilayer transparent conducting oxide films

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  33. Chemical and Structural Factors Governing Transparent Conductivity in Oxides

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  34. Effects of oxygen contents on the electrical and optical properties of indium molybdenum oxide films fabricated by high density plasma evaporation

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  35. New transparent conductors with the M7O12 ordered oxygen-deficient fluorite structure: from In4Sn3O12 to In5.5Sb1.5O12

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  36. Effects of H2 in indium–molybdenum oxide films during high density plasma evaporation at room temperature

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  37. Preparation and characterization of Ni–indium tin oxide cosputtered thin films for organic light-emitting diode application

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  38. Antimony and antimony–tin doped indium oxide, IAO and IATO: promising transparent conductors

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  39. Dopant Ion Size and Electronic Structure Effects on Transparent Conducting Oxides. Sc-Doped CdO Thin Films Grown by MOCVD

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  40. Synthesis, microstructure, and electrical properties of the delafossite compound CuGaO2

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  41. Electronic Structure Studies of Main Group Oxides Possessing Edge-Sharing Octahedra: Implications for the Design of Transparent Conducting Oxides

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  42. Effect of the H2 Annealing on the Electrical Properties of In2O3-SnO2 Thin Films

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  43. The electrical, optical and structural properties of InxZn1−xOy(0 x 1) thin films by combinatorial techniques

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  44. High Resistivity Zinc Stannate As A Buffer Layer In CdS/CdTe Solar Cells

    Digital Commons - University of South Florida (University of South Florida) · 2005-01-01

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  45. Properties of Indium Molybdenum Oxide Films Fabricated Via High-Density Plasma Evaporation at Room Temperature

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  46. Recent developments in the emerging field of crystalline p-type transparent conducting oxide thin films

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  47. The surface and materials science of tin oxide

    Progress in Surface Science · 2005-01-01

    Matthias Batzill, Ulrike Diebold

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  48. ZITO (ZnO-SnO2-In2O3 ) Transparent Conducting Oxides: Electrical and Optical Properties of DC Magnetron Sputtered Films

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    Cleva W. Ow‐Yang, Hyo‐Young Yeom, Burağ Yağlıoğlu, David C. Paine

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  49. Properties of R.F. magnetron sputtered cadmium–tin–oxide and indium–tin–oxide thin films

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    W. Wohlmuth, I. Adesida

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  50. Structural, electrical and optical properties of In2O3:Mo films deposited by spray pyrolysis

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