RESEARCH PAPER · The Journal of Physical Chemistry C · 2013
Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition
Lei Yu, Junling Lu, Haiyan Y. Zhao, Bin Liu, Ke-Bin Low, Tianpin Wu, Joseph A. Libera, Jeffrey Greeley, Peter J. Chupas, Jeffrey T. Miller, Jeffrey W. Elam
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